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• W2156538619 abstract "This paper reports a new MEMS-based chemical sensor for hydrogen gas detection, using a highly sensitive micro-thermal sensor. The proposed micro-thermal sensor detects the reaction heat between novel metal catalyst and hydrogen by measuring dc voltage from Cr-Bi thermopile. The proposed micro-thermal sensor, which consists of reference and sensing thermopile, was fabricated on a high thermal resistivity layer for reducing parasitic heat transfer. A metal catalyst was deposited on only the sensing thermopile. And then, In order to remove noises such as external change of temperature, gas flow and electrical noise, a difference between output signals of reference and sensing thermopile was measured by using differential amplifier. To verify its feasibility of the sensor for hydrogen gas detection, various concentrations (0.1, 0.5, 1%) of hydrogen gas were measured. The result of the measurement shows that output voltages of the sensor increases linearly according to the gas concentrations." @default.
• W2156538619 created "2016-06-24" @default.
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• W2156538619 date "2007-01-01" @default.
• W2156538619 modified "2023-09-23" @default.
• W2156538619 title "A highly sensitive micro-thermal sensor for hydrogen detection" @default.
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• W2156538619 doi "https://doi.org/10.1109/icsens.2007.4388370" @default.
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