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- W2156570010 abstract "Plasma doping is one of the candidates of the impurity doping processes to form shallow junction. Although the PD is a highly efficient doping process, it would be useful to establish a proper wet cleaning method that follows the PD processes so that the PD can be used in the conventional semiconductor fabrication flow. The effects of the photo-resist masks are examined in conjunction with the PD processes including the retained dose after the removal of the photo-resist using the ashing." @default.
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- W2156570010 date "2005-01-01" @default.
- W2156570010 modified "2023-10-17" @default.
- W2156570010 title "Feasibility study of plasma doping on Si substrates with photo-resist patterns" @default.
- W2156570010 doi "https://doi.org/10.1109/iwjt.2005.203886" @default.
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