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- W2156768372 abstract "Testing technique is more and more important in the industrialization of research and development of MEMS. Based on machine micro-vision dynamic testing system for MEMS is established. The technique of blur image synthesis is presented to extract and analyze in-plane motion characteristics of MEMS devices. Image processing method is used to carry out frequency sweep and voltage sweep measurements. The in-plane motion characteristics of MEMS are obtained and the testing results are analyzed and discussed. The resolution and repeatability of the method can obtain to 100 nm." @default.
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- W2156768372 date "2004-10-19" @default.
- W2156768372 modified "2023-09-23" @default.
- W2156768372 title "Measurement technique of in-plane motion for MEMS based on blur image synthesis" @default.
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- W2156768372 doi "https://doi.org/10.1109/wcica.2004.1342216" @default.
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