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- W2156834810 abstract "An ionic-type humidity sensor based on a plasma-deposited nanophase Si thin film was developed. Detection of relative humidity cycles between 20% and 90% was possible in /spl les/0.2 s with /spl sim/5 orders of magnitude variation in conductance. Such superior performance is attributable to the unique arrayed column-void network structure and ultrafine thickness (e.g., 50 nm) of the Si film as well as to the lateral electrode configuration. Our sensor can be miniaturized, integrated with signal processing circuits, and fabricated on plastics. A crucial implementation, where our sensor would be very suitable and beneficial, is respiratory monitoring." @default.
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- W2156834810 date "2004-08-01" @default.
- W2156834810 modified "2023-09-26" @default.
- W2156834810 title "A Rapid-Response, High-Sensitivity Nanophase Humidity Sensor for Respiratory Monitoring" @default.
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- W2156834810 doi "https://doi.org/10.1109/led.2004.832657" @default.
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