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- W2156840059 abstract "This paper proposes a new oxidation model that can be applied to spatially non-uniform oxidations in a two dimensional scheme. The model describes the viscoelastic deformation of SiO 2 and the oxidation masking material as well as the oxidant diffusion in the growing SiO 2 . The Maxwell model is assumed for the stress relaxation function. The viscoelastic equation is solved using the boundary element method. Simulations aimed for the LOCOS oxide growth result in good agreement with experimental data. This model is found to be suitable for oxidation characterization for VLSIs." @default.
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- W2156840059 date "1983-01-01" @default.
- W2156840059 modified "2023-09-27" @default.
- W2156840059 title "A two-dimensional SI oxidation model including viscoelasticity" @default.
- W2156840059 doi "https://doi.org/10.1109/iedm.1983.190435" @default.
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