FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2156874234> ?p ?o ?g. }

• W2156874234 endingPage "91" @default.
• W2156874234 startingPage "81" @default.
• W2156874234 abstract "Various ceria and colloidal silica polishing slurries were used to polish fused silica glass workpieces on a polyurethane pad. Characterization of the slurries' particle size distribution ( PSD ) (using both ensemble light scattering and single particle counting techniques) and of the polished workpiece surface (using atomic force microscopy) was performed. The results show the final workpiece surface roughness is quantitatively correlated with the logarithmic slope of the distribution function for the largest particles at the exponential tail end of the PSD . Using the measured PSD , fraction of pad area making contact, and mechanical properties of the workpiece, slurry, and pad as input parameters, an Ensemble Hertzian Gap ( EHG ) polishing model was formulated to estimate each particle's penetration, load, and contact zone. The model is based on multiple Hertzian contact of slurry particles at the workpiece–pad interface in which the effective interface gap is determined through an elastic load balance. Separately, ceria particle static contact and single pass sliding experiments were performed showing ~1‐nm depth removal per pass (i.e., a plastic type removal). Also, nanoindentation measurements on fused silica were made to estimate the critical load at which plastic type removal starts to occur ( P crit ~5 × 10 −5 N). Next the EHG model was extended to create simulated polished surfaces using the Monte Carlo method where each particle (with the calculated characteristics described above) slides and removes material from the silica surface in random directions. The polishing simulation utilized a constant depth removal mechanism (i.e., not scaling with particle size) of the elastic deformation zone cross section between the particle and silica surface, which was either 0.04 nm (for chemical removal) at low loads (< P crit ) or 1.0 nm (for plastic removal) at intermediate loads (> P crit ). The simulated surfaces quantitatively compare well with the measured rms roughness, power spectra, surface texture, absolute thickness material removal rate, and load dependence of removal rate." @default.
• W2156874234 created "2016-06-24" @default.
• W2156874234 creator A5018752601 @default.
• W2156874234 creator A5019618371 @default.
• W2156874234 creator A5026946634 @default.
• W2156874234 creator A5029090824 @default.
• W2156874234 creator A5029943884 @default.
• W2156874234 creator A5034752649 @default.
• W2156874234 creator A5061016942 @default.
• W2156874234 creator A5076208479 @default.
• W2156874234 creator A5085800262 @default.
• W2156874234 creator A5090187464 @default.
• W2156874234 creator A5091481894 @default.
• W2156874234 date "2013-11-29" @default.
• W2156874234 modified "2023-10-06" @default.
• W2156874234 title "Microscopic Removal Function and the Relationship Between Slurry Particle Size Distribution and Workpiece Roughness During Pad Polishing" @default.
• W2156874234 cites W1546625087 @default.
• W2156874234 cites W179372779 @default.
• W2156874234 cites W1965717759 @default.
• W2156874234 cites W1972207333 @default.
• W2156874234 cites W2011926817 @default.
• W2156874234 cites W2012582066 @default.
• W2156874234 cites W2020277644 @default.
• W2156874234 cites W2039220065 @default.
• W2156874234 cites W2042266322 @default.
• W2156874234 cites W2042946075 @default.
• W2156874234 cites W2060404255 @default.
• W2156874234 cites W2069576608 @default.
• W2156874234 cites W2074711008 @default.
• W2156874234 cites W2076769508 @default.
• W2156874234 cites W2095311261 @default.
• W2156874234 cites W2102994661 @default.
• W2156874234 cites W2105451852 @default.
• W2156874234 cites W2108387096 @default.
• W2156874234 cites W2123982555 @default.
• W2156874234 cites W2127767984 @default.
• W2156874234 cites W2158215530 @default.
• W2156874234 cites W2162631710 @default.
• W2156874234 cites W2164856751 @default.
• W2156874234 cites W2167078872 @default.
• W2156874234 cites W2525486548 @default.
• W2156874234 doi "https://doi.org/10.1111/jace.12631" @default.
• W2156874234 hasPublicationYear "2013" @default.
• W2156874234 type Work @default.
• W2156874234 sameAs 2156874234 @default.
• W2156874234 citedByCount "50" @default.
• W2156874234 countsByYear W21568742342014 @default.
• W2156874234 countsByYear W21568742342015 @default.
• W2156874234 countsByYear W21568742342016 @default.
• W2156874234 countsByYear W21568742342017 @default.
• W2156874234 countsByYear W21568742342018 @default.
• W2156874234 countsByYear W21568742342019 @default.
• W2156874234 countsByYear W21568742342020 @default.
• W2156874234 countsByYear W21568742342021 @default.
• W2156874234 countsByYear W21568742342022 @default.
• W2156874234 countsByYear W21568742342023 @default.
• W2156874234 crossrefType "journal-article" @default.
• W2156874234 hasAuthorship W2156874234A5018752601 @default.
• W2156874234 hasAuthorship W2156874234A5019618371 @default.
• W2156874234 hasAuthorship W2156874234A5026946634 @default.
• W2156874234 hasAuthorship W2156874234A5029090824 @default.
• W2156874234 hasAuthorship W2156874234A5029943884 @default.
• W2156874234 hasAuthorship W2156874234A5034752649 @default.
• W2156874234 hasAuthorship W2156874234A5061016942 @default.
• W2156874234 hasAuthorship W2156874234A5076208479 @default.
• W2156874234 hasAuthorship W2156874234A5085800262 @default.
• W2156874234 hasAuthorship W2156874234A5090187464 @default.
• W2156874234 hasAuthorship W2156874234A5091481894 @default.
• W2156874234 hasBestOaLocation W21568742342 @default.
• W2156874234 hasConcept C107365816 @default.
• W2156874234 hasConcept C111368507 @default.
• W2156874234 hasConcept C127313418 @default.
• W2156874234 hasConcept C127413603 @default.
• W2156874234 hasConcept C135628077 @default.
• W2156874234 hasConcept C138113353 @default.
• W2156874234 hasConcept C147789679 @default.
• W2156874234 hasConcept C159985019 @default.
• W2156874234 hasConcept C179909247 @default.
• W2156874234 hasConcept C180088628 @default.
• W2156874234 hasConcept C185592680 @default.
• W2156874234 hasConcept C187530423 @default.
• W2156874234 hasConcept C192562407 @default.
• W2156874234 hasConcept C2778024142 @default.
• W2156874234 hasConcept C2778517922 @default.
• W2156874234 hasConcept C2781448156 @default.
• W2156874234 hasConcept C49326732 @default.
• W2156874234 hasConcept C60448018 @default.
• W2156874234 hasConcept C66938386 @default.
• W2156874234 hasConcept C71039073 @default.
• W2156874234 hasConcept C94293008 @default.
• W2156874234 hasConceptScore W2156874234C107365816 @default.
• W2156874234 hasConceptScore W2156874234C111368507 @default.
• W2156874234 hasConceptScore W2156874234C127313418 @default.
• W2156874234 hasConceptScore W2156874234C127413603 @default.
• W2156874234 hasConceptScore W2156874234C135628077 @default.
• W2156874234 hasConceptScore W2156874234C138113353 @default.
• W2156874234 hasConceptScore W2156874234C147789679 @default.
• W2156874234 hasConceptScore W2156874234C159985019 @default.

• next