Matches in SemOpenAlex for { <https://semopenalex.org/work/W2156877726> ?p ?o ?g. }
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- W2156877726 endingPage "4625" @default.
- W2156877726 startingPage "4622" @default.
- W2156877726 abstract "High-quality and stable silicon dioxide (SiO2) films grown at room temperature on silicon substrates by the liquid phase deposition (LPD) method have been developed and studied. In this work, the optimum controlling parameters for obtaining the best LPD-SiO2 film refractive index are studied and found to be a growth solution of 1.3 cP and a growth solution temperature of 10°C. Maximum growth rate and refractive index are 360 Å/h and 1.483, respectively, with a leakage current of 150 fA and a dielectric breakdown field of 11.2 MV/cm." @default.
- W2156877726 created "2016-06-24" @default.
- W2156877726 creator A5003298635 @default.
- W2156877726 date "2002-07-15" @default.
- W2156877726 modified "2023-10-18" @default.
- W2156877726 title "Quality Optimization of Liquid Phase Deposition SiO<sub>2</sub>Films on Silicon" @default.
- W2156877726 cites W1556135072 @default.
- W2156877726 cites W2042596558 @default.
- W2156877726 cites W2079321111 @default.
- W2156877726 cites W3000032219 @default.
- W2156877726 doi "https://doi.org/10.1143/jjap.41.4622" @default.
- W2156877726 hasPublicationYear "2002" @default.
- W2156877726 type Work @default.
- W2156877726 sameAs 2156877726 @default.
- W2156877726 citedByCount "8" @default.
- W2156877726 countsByYear W21568777262016 @default.
- W2156877726 countsByYear W21568777262017 @default.
- W2156877726 countsByYear W21568777262018 @default.
- W2156877726 countsByYear W21568777262019 @default.
- W2156877726 crossrefType "journal-article" @default.
- W2156877726 hasAuthorship W2156877726A5003298635 @default.
- W2156877726 hasConcept C113196181 @default.
- W2156877726 hasConcept C121332964 @default.
- W2156877726 hasConcept C133386390 @default.
- W2156877726 hasConcept C139719470 @default.
- W2156877726 hasConcept C151730666 @default.
- W2156877726 hasConcept C159985019 @default.
- W2156877726 hasConcept C162324750 @default.
- W2156877726 hasConcept C171250308 @default.
- W2156877726 hasConcept C178790620 @default.
- W2156877726 hasConcept C185592680 @default.
- W2156877726 hasConcept C19067145 @default.
- W2156877726 hasConcept C192562407 @default.
- W2156877726 hasConcept C2777042071 @default.
- W2156877726 hasConcept C2779089622 @default.
- W2156877726 hasConcept C2816523 @default.
- W2156877726 hasConcept C3020315061 @default.
- W2156877726 hasConcept C42067758 @default.
- W2156877726 hasConcept C43617362 @default.
- W2156877726 hasConcept C44280652 @default.
- W2156877726 hasConcept C49040817 @default.
- W2156877726 hasConcept C544956773 @default.
- W2156877726 hasConcept C64297162 @default.
- W2156877726 hasConcept C86803240 @default.
- W2156877726 hasConcept C97355855 @default.
- W2156877726 hasConceptScore W2156877726C113196181 @default.
- W2156877726 hasConceptScore W2156877726C121332964 @default.
- W2156877726 hasConceptScore W2156877726C133386390 @default.
- W2156877726 hasConceptScore W2156877726C139719470 @default.
- W2156877726 hasConceptScore W2156877726C151730666 @default.
- W2156877726 hasConceptScore W2156877726C159985019 @default.
- W2156877726 hasConceptScore W2156877726C162324750 @default.
- W2156877726 hasConceptScore W2156877726C171250308 @default.
- W2156877726 hasConceptScore W2156877726C178790620 @default.
- W2156877726 hasConceptScore W2156877726C185592680 @default.
- W2156877726 hasConceptScore W2156877726C19067145 @default.
- W2156877726 hasConceptScore W2156877726C192562407 @default.
- W2156877726 hasConceptScore W2156877726C2777042071 @default.
- W2156877726 hasConceptScore W2156877726C2779089622 @default.
- W2156877726 hasConceptScore W2156877726C2816523 @default.
- W2156877726 hasConceptScore W2156877726C3020315061 @default.
- W2156877726 hasConceptScore W2156877726C42067758 @default.
- W2156877726 hasConceptScore W2156877726C43617362 @default.
- W2156877726 hasConceptScore W2156877726C44280652 @default.
- W2156877726 hasConceptScore W2156877726C49040817 @default.
- W2156877726 hasConceptScore W2156877726C544956773 @default.
- W2156877726 hasConceptScore W2156877726C64297162 @default.
- W2156877726 hasConceptScore W2156877726C86803240 @default.
- W2156877726 hasConceptScore W2156877726C97355855 @default.
- W2156877726 hasIssue "Part 1, No. 7A" @default.
- W2156877726 hasLocation W21568777261 @default.
- W2156877726 hasOpenAccess W2156877726 @default.
- W2156877726 hasPrimaryLocation W21568777261 @default.
- W2156877726 hasRelatedWork W2033872494 @default.
- W2156877726 hasRelatedWork W2043673973 @default.
- W2156877726 hasRelatedWork W2059607819 @default.
- W2156877726 hasRelatedWork W2156877726 @default.
- W2156877726 hasRelatedWork W2318226504 @default.
- W2156877726 hasRelatedWork W2371191966 @default.
- W2156877726 hasRelatedWork W2377811089 @default.
- W2156877726 hasRelatedWork W2897699609 @default.
- W2156877726 hasRelatedWork W3092585306 @default.
- W2156877726 hasRelatedWork W4386572472 @default.
- W2156877726 hasVolume "41" @default.
- W2156877726 isParatext "false" @default.
- W2156877726 isRetracted "false" @default.
- W2156877726 magId "2156877726" @default.
- W2156877726 workType "article" @default.