Matches in SemOpenAlex for { <https://semopenalex.org/work/W2156994137> ?p ?o ?g. }
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93
with 100 items per page.
- W2156994137 endingPage "D84" @default.
- W2156994137 startingPage "D84" @default.
- W2156994137 abstract "In our previous work, we reported on silicon wire formation through the pit formed by metal-assisted chemical etching method as an alternative of a periodical etch pit with an inverted pyramid shape created by alkaline etching. We propose a further new process to fabricate silicon wires with a high aspect ratio not using the two-type etch pit in p-type silicon. The proposed process used a typical positive photoresist as an etching mask and a consecutive double-step current density method. The novel process is further simple and cost-effective, and decreases the number of total processes for electrochemical etching process." @default.
- W2156994137 created "2016-06-24" @default.
- W2156994137 creator A5017500348 @default.
- W2156994137 creator A5024256371 @default.
- W2156994137 creator A5052610963 @default.
- W2156994137 date "2011-01-01" @default.
- W2156994137 modified "2023-10-16" @default.
- W2156994137 title "Formation of p-Silicon Wire by Electrochemical Etching Using Positive Photoresist as an Etch Mask in Organic Electrolyte" @default.
- W2156994137 cites W1969138729 @default.
- W2156994137 cites W1972806516 @default.
- W2156994137 cites W1985420254 @default.
- W2156994137 cites W1987416224 @default.
- W2156994137 cites W1991959987 @default.
- W2156994137 cites W1999197151 @default.
- W2156994137 cites W2016641604 @default.
- W2156994137 cites W2030024314 @default.
- W2156994137 cites W2039517021 @default.
- W2156994137 cites W2043490617 @default.
- W2156994137 cites W2045362903 @default.
- W2156994137 cites W2076712020 @default.
- W2156994137 cites W2088273845 @default.
- W2156994137 cites W2090883770 @default.
- W2156994137 cites W2092333682 @default.
- W2156994137 cites W2120638729 @default.
- W2156994137 cites W2128769040 @default.
- W2156994137 cites W2131067882 @default.
- W2156994137 cites W2137891877 @default.
- W2156994137 cites W2162403034 @default.
- W2156994137 cites W3158864713 @default.
- W2156994137 doi "https://doi.org/10.1149/1.3594111" @default.
- W2156994137 hasPublicationYear "2011" @default.
- W2156994137 type Work @default.
- W2156994137 sameAs 2156994137 @default.
- W2156994137 citedByCount "4" @default.
- W2156994137 countsByYear W21569941372019 @default.
- W2156994137 countsByYear W21569941372022 @default.
- W2156994137 crossrefType "journal-article" @default.
- W2156994137 hasAuthorship W2156994137A5017500348 @default.
- W2156994137 hasAuthorship W2156994137A5024256371 @default.
- W2156994137 hasAuthorship W2156994137A5052610963 @default.
- W2156994137 hasConcept C100460472 @default.
- W2156994137 hasConcept C1291036 @default.
- W2156994137 hasConcept C130472188 @default.
- W2156994137 hasConcept C134406635 @default.
- W2156994137 hasConcept C147789679 @default.
- W2156994137 hasConcept C171250308 @default.
- W2156994137 hasConcept C17525397 @default.
- W2156994137 hasConcept C185592680 @default.
- W2156994137 hasConcept C192562407 @default.
- W2156994137 hasConcept C2779227376 @default.
- W2156994137 hasConcept C33220542 @default.
- W2156994137 hasConcept C49040817 @default.
- W2156994137 hasConcept C52859227 @default.
- W2156994137 hasConcept C53524968 @default.
- W2156994137 hasConcept C544956773 @default.
- W2156994137 hasConcept C68801617 @default.
- W2156994137 hasConceptScore W2156994137C100460472 @default.
- W2156994137 hasConceptScore W2156994137C1291036 @default.
- W2156994137 hasConceptScore W2156994137C130472188 @default.
- W2156994137 hasConceptScore W2156994137C134406635 @default.
- W2156994137 hasConceptScore W2156994137C147789679 @default.
- W2156994137 hasConceptScore W2156994137C171250308 @default.
- W2156994137 hasConceptScore W2156994137C17525397 @default.
- W2156994137 hasConceptScore W2156994137C185592680 @default.
- W2156994137 hasConceptScore W2156994137C192562407 @default.
- W2156994137 hasConceptScore W2156994137C2779227376 @default.
- W2156994137 hasConceptScore W2156994137C33220542 @default.
- W2156994137 hasConceptScore W2156994137C49040817 @default.
- W2156994137 hasConceptScore W2156994137C52859227 @default.
- W2156994137 hasConceptScore W2156994137C53524968 @default.
- W2156994137 hasConceptScore W2156994137C544956773 @default.
- W2156994137 hasConceptScore W2156994137C68801617 @default.
- W2156994137 hasIssue "8" @default.
- W2156994137 hasLocation W21569941371 @default.
- W2156994137 hasOpenAccess W2156994137 @default.
- W2156994137 hasPrimaryLocation W21569941371 @default.
- W2156994137 hasRelatedWork W1993620123 @default.
- W2156994137 hasRelatedWork W2002269833 @default.
- W2156994137 hasRelatedWork W2105088346 @default.
- W2156994137 hasRelatedWork W2113489028 @default.
- W2156994137 hasRelatedWork W2118607114 @default.
- W2156994137 hasRelatedWork W2164598813 @default.
- W2156994137 hasRelatedWork W2360631777 @default.
- W2156994137 hasRelatedWork W2777377593 @default.
- W2156994137 hasRelatedWork W3176589696 @default.
- W2156994137 hasRelatedWork W1953308597 @default.
- W2156994137 hasVolume "14" @default.
- W2156994137 isParatext "false" @default.
- W2156994137 isRetracted "false" @default.
- W2156994137 magId "2156994137" @default.
- W2156994137 workType "article" @default.