Matches in SemOpenAlex for { <https://semopenalex.org/work/W2157041433> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2157041433 endingPage "1253" @default.
- W2157041433 startingPage "1253" @default.
- W2157041433 abstract "A comparative study is made of four methods for treating the graded nature of the Si–SiO2 interface in the analysis of ellipsometry data: (1) the stratified-media model, in which the total number of layers is large (>10); (2) the three-boundary approximation, in which the interface is treated as a single, homogeneous layer; (3) the two-boundary approximation, in which the effects of the interface are incorporated into an effective oxide-layer thickness; and (4) the integral-equation method, approximated to first order, of Plieth and Naegele [ Surf. Sci.64, 484 ( 1977)]. The Si–SiO2 transition layer is assumed to have optical functions that vary monotonically between those of Si and SiO2 in six different ways. In each of the six cases, the ellipsometry parameters ψ and Δ are computed for the air–SiO2-interface bulk-Si system by using the four methods stated above. The results illustrate the sensitivity of ellipsometry to the interface layer and reveal that the interface layer must be properly taken into account for accurate analysis. It is concluded that the three-boundary approximation is not necessarily more accurate than a judiciously applied two-boundary model and that the first-order approximation of Plieth and Naegele introduces sizable errors at short wavelengths for the Si–SiO2 interface." @default.
- W2157041433 created "2016-06-24" @default.
- W2157041433 creator A5006909614 @default.
- W2157041433 creator A5041931325 @default.
- W2157041433 date "1982-09-01" @default.
- W2157041433 modified "2023-09-27" @default.
- W2157041433 title "Optical nature of interface layers: a comparative study of the Si–SiO_2 interface" @default.
- W2157041433 cites W1971868582 @default.
- W2157041433 cites W2020948461 @default.
- W2157041433 cites W2038551630 @default.
- W2157041433 cites W2047378842 @default.
- W2157041433 cites W2091358179 @default.
- W2157041433 cites W2092536762 @default.
- W2157041433 cites W2099840590 @default.
- W2157041433 cites W2115434338 @default.
- W2157041433 cites W2140127807 @default.
- W2157041433 doi "https://doi.org/10.1364/josa.72.001253" @default.
- W2157041433 hasPublicationYear "1982" @default.
- W2157041433 type Work @default.
- W2157041433 sameAs 2157041433 @default.
- W2157041433 citedByCount "19" @default.
- W2157041433 countsByYear W21570414332022 @default.
- W2157041433 crossrefType "journal-article" @default.
- W2157041433 hasAuthorship W2157041433A5006909614 @default.
- W2157041433 hasAuthorship W2157041433A5041931325 @default.
- W2157041433 hasConcept C113843644 @default.
- W2157041433 hasConcept C120665830 @default.
- W2157041433 hasConcept C121332964 @default.
- W2157041433 hasConcept C134306372 @default.
- W2157041433 hasConcept C159985019 @default.
- W2157041433 hasConcept C171250308 @default.
- W2157041433 hasConcept C182310444 @default.
- W2157041433 hasConcept C18293161 @default.
- W2157041433 hasConcept C19067145 @default.
- W2157041433 hasConcept C192562407 @default.
- W2157041433 hasConcept C196806460 @default.
- W2157041433 hasConcept C2779227376 @default.
- W2157041433 hasConcept C28413391 @default.
- W2157041433 hasConcept C33923547 @default.
- W2157041433 hasConcept C49040817 @default.
- W2157041433 hasConcept C62354387 @default.
- W2157041433 hasConcept C6260449 @default.
- W2157041433 hasConcept C72169020 @default.
- W2157041433 hasConceptScore W2157041433C113843644 @default.
- W2157041433 hasConceptScore W2157041433C120665830 @default.
- W2157041433 hasConceptScore W2157041433C121332964 @default.
- W2157041433 hasConceptScore W2157041433C134306372 @default.
- W2157041433 hasConceptScore W2157041433C159985019 @default.
- W2157041433 hasConceptScore W2157041433C171250308 @default.
- W2157041433 hasConceptScore W2157041433C182310444 @default.
- W2157041433 hasConceptScore W2157041433C18293161 @default.
- W2157041433 hasConceptScore W2157041433C19067145 @default.
- W2157041433 hasConceptScore W2157041433C192562407 @default.
- W2157041433 hasConceptScore W2157041433C196806460 @default.
- W2157041433 hasConceptScore W2157041433C2779227376 @default.
- W2157041433 hasConceptScore W2157041433C28413391 @default.
- W2157041433 hasConceptScore W2157041433C33923547 @default.
- W2157041433 hasConceptScore W2157041433C49040817 @default.
- W2157041433 hasConceptScore W2157041433C62354387 @default.
- W2157041433 hasConceptScore W2157041433C6260449 @default.
- W2157041433 hasConceptScore W2157041433C72169020 @default.
- W2157041433 hasIssue "9" @default.
- W2157041433 hasLocation W21570414331 @default.
- W2157041433 hasOpenAccess W2157041433 @default.
- W2157041433 hasPrimaryLocation W21570414331 @default.
- W2157041433 hasRelatedWork W1964143041 @default.
- W2157041433 hasRelatedWork W1964312716 @default.
- W2157041433 hasRelatedWork W2054803580 @default.
- W2157041433 hasRelatedWork W2057301101 @default.
- W2157041433 hasRelatedWork W2080956175 @default.
- W2157041433 hasRelatedWork W2117959882 @default.
- W2157041433 hasRelatedWork W2133248793 @default.
- W2157041433 hasRelatedWork W2589080933 @default.
- W2157041433 hasRelatedWork W2961581639 @default.
- W2157041433 hasRelatedWork W3033767418 @default.
- W2157041433 hasVolume "72" @default.
- W2157041433 isParatext "false" @default.
- W2157041433 isRetracted "false" @default.
- W2157041433 magId "2157041433" @default.
- W2157041433 workType "article" @default.