Matches in SemOpenAlex for { <https://semopenalex.org/work/W2157093764> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2157093764 abstract "Electroplating is a vital component of MCM-technology because it is the most cost effective method available for deposition of thick copper interconnects. A vital issue in the use of electroplated copper is the uniformity of the deposit. Thickness uniformity of 5% is desirable but often difficult to obtain. A rotating disk electroplating process that consistently achieves the required uniformity has been developed. It is an extremely robust system, capable of reproducing the required uniformity in spite of great variations in electroplating conditions. The parameters that have been studied include uneven rotation rate, wobble, and fluctuating current. Studies have also been done on the effect that rotation speed has on both uniformity and deposition rate." @default.
- W2157093764 created "2016-06-24" @default.
- W2157093764 creator A5001502145 @default.
- W2157093764 creator A5005451983 @default.
- W2157093764 creator A5005717401 @default.
- W2157093764 creator A5028363976 @default.
- W2157093764 creator A5042033837 @default.
- W2157093764 date "2002-11-22" @default.
- W2157093764 modified "2023-09-26" @default.
- W2157093764 title "Uniform copper electroplating for application to multichip modules" @default.
- W2157093764 doi "https://doi.org/10.1109/icmcm.1997.581178" @default.
- W2157093764 hasPublicationYear "2002" @default.
- W2157093764 type Work @default.
- W2157093764 sameAs 2157093764 @default.
- W2157093764 citedByCount "2" @default.
- W2157093764 countsByYear W21570937642012 @default.
- W2157093764 crossrefType "proceedings-article" @default.
- W2157093764 hasAuthorship W2157093764A5001502145 @default.
- W2157093764 hasAuthorship W2157093764A5005451983 @default.
- W2157093764 hasAuthorship W2157093764A5005717401 @default.
- W2157093764 hasAuthorship W2157093764A5028363976 @default.
- W2157093764 hasAuthorship W2157093764A5042033837 @default.
- W2157093764 hasConcept C127313418 @default.
- W2157093764 hasConcept C127413603 @default.
- W2157093764 hasConcept C151730666 @default.
- W2157093764 hasConcept C154945302 @default.
- W2157093764 hasConcept C159985019 @default.
- W2157093764 hasConcept C191897082 @default.
- W2157093764 hasConcept C192562407 @default.
- W2157093764 hasConcept C2779227376 @default.
- W2157093764 hasConcept C2816523 @default.
- W2157093764 hasConcept C41008148 @default.
- W2157093764 hasConcept C51807945 @default.
- W2157093764 hasConcept C544778455 @default.
- W2157093764 hasConcept C64297162 @default.
- W2157093764 hasConcept C74050887 @default.
- W2157093764 hasConcept C78519656 @default.
- W2157093764 hasConcept C81063470 @default.
- W2157093764 hasConceptScore W2157093764C127313418 @default.
- W2157093764 hasConceptScore W2157093764C127413603 @default.
- W2157093764 hasConceptScore W2157093764C151730666 @default.
- W2157093764 hasConceptScore W2157093764C154945302 @default.
- W2157093764 hasConceptScore W2157093764C159985019 @default.
- W2157093764 hasConceptScore W2157093764C191897082 @default.
- W2157093764 hasConceptScore W2157093764C192562407 @default.
- W2157093764 hasConceptScore W2157093764C2779227376 @default.
- W2157093764 hasConceptScore W2157093764C2816523 @default.
- W2157093764 hasConceptScore W2157093764C41008148 @default.
- W2157093764 hasConceptScore W2157093764C51807945 @default.
- W2157093764 hasConceptScore W2157093764C544778455 @default.
- W2157093764 hasConceptScore W2157093764C64297162 @default.
- W2157093764 hasConceptScore W2157093764C74050887 @default.
- W2157093764 hasConceptScore W2157093764C78519656 @default.
- W2157093764 hasConceptScore W2157093764C81063470 @default.
- W2157093764 hasLocation W21570937641 @default.
- W2157093764 hasOpenAccess W2157093764 @default.
- W2157093764 hasPrimaryLocation W21570937641 @default.
- W2157093764 hasRelatedWork W1643829646 @default.
- W2157093764 hasRelatedWork W1999186500 @default.
- W2157093764 hasRelatedWork W2012595766 @default.
- W2157093764 hasRelatedWork W2017707524 @default.
- W2157093764 hasRelatedWork W2021767751 @default.
- W2157093764 hasRelatedWork W2037236874 @default.
- W2157093764 hasRelatedWork W2058227570 @default.
- W2157093764 hasRelatedWork W2074456909 @default.
- W2157093764 hasRelatedWork W2075537536 @default.
- W2157093764 hasRelatedWork W2100136121 @default.
- W2157093764 hasRelatedWork W2118368628 @default.
- W2157093764 hasRelatedWork W2127826033 @default.
- W2157093764 hasRelatedWork W2158807997 @default.
- W2157093764 hasRelatedWork W2159372953 @default.
- W2157093764 hasRelatedWork W2164254535 @default.
- W2157093764 hasRelatedWork W2278059977 @default.
- W2157093764 hasRelatedWork W2294215139 @default.
- W2157093764 hasRelatedWork W2545701218 @default.
- W2157093764 hasRelatedWork W2971290667 @default.
- W2157093764 hasRelatedWork W2868572622 @default.
- W2157093764 isParatext "false" @default.
- W2157093764 isRetracted "false" @default.
- W2157093764 magId "2157093764" @default.
- W2157093764 workType "article" @default.