Matches in SemOpenAlex for { <https://semopenalex.org/work/W2157370650> ?p ?o ?g. }
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- W2157370650 endingPage "113603" @default.
- W2157370650 startingPage "113603" @default.
- W2157370650 abstract "The application of dual-grating moiré fringe is introduced in lithography alignment. Minute angular displacement between the two alignment marks will lead to the tilt of moiré fringe, which has an influence in high-accuracy alignment. Proposed is a novel measurement method of angular displacement based on the phase of moiré fringe. The relationship between phase of moiré fringe and angular displacement is analyzed. Both simulation and experiment indicate that an angular displacement can be determined to achieve a linear displacement measurement with error of nanometer level." @default.
- W2157370650 created "2016-06-24" @default.
- W2157370650 creator A5027796655 @default.
- W2157370650 creator A5034876495 @default.
- W2157370650 creator A5038618652 @default.
- W2157370650 creator A5084564855 @default.
- W2157370650 date "2012-11-01" @default.
- W2157370650 modified "2023-10-18" @default.
- W2157370650 title "Alignment method based on matched dual-grating moiré fringe for proximity lithography" @default.
- W2157370650 doi "https://doi.org/10.1117/1.oe.51.11.113603" @default.
- W2157370650 hasPublicationYear "2012" @default.
- W2157370650 type Work @default.
- W2157370650 sameAs 2157370650 @default.
- W2157370650 citedByCount "15" @default.
- W2157370650 countsByYear W21573706502013 @default.
- W2157370650 countsByYear W21573706502014 @default.
- W2157370650 countsByYear W21573706502015 @default.
- W2157370650 countsByYear W21573706502016 @default.
- W2157370650 countsByYear W21573706502017 @default.
- W2157370650 countsByYear W21573706502018 @default.
- W2157370650 countsByYear W21573706502020 @default.
- W2157370650 countsByYear W21573706502021 @default.
- W2157370650 countsByYear W21573706502023 @default.
- W2157370650 crossrefType "journal-article" @default.
- W2157370650 hasAuthorship W2157370650A5027796655 @default.
- W2157370650 hasAuthorship W2157370650A5034876495 @default.
- W2157370650 hasAuthorship W2157370650A5038618652 @default.
- W2157370650 hasAuthorship W2157370650A5084564855 @default.
- W2157370650 hasConcept C100921725 @default.
- W2157370650 hasConcept C107551265 @default.
- W2157370650 hasConcept C108439606 @default.
- W2157370650 hasConcept C120665830 @default.
- W2157370650 hasConcept C121332964 @default.
- W2157370650 hasConcept C127413603 @default.
- W2157370650 hasConcept C15744967 @default.
- W2157370650 hasConcept C166689943 @default.
- W2157370650 hasConcept C192562407 @default.
- W2157370650 hasConcept C204223013 @default.
- W2157370650 hasConcept C24890656 @default.
- W2157370650 hasConcept C2777813233 @default.
- W2157370650 hasConcept C2779844322 @default.
- W2157370650 hasConcept C44280652 @default.
- W2157370650 hasConcept C542102704 @default.
- W2157370650 hasConcept C62520636 @default.
- W2157370650 hasConcept C70000540 @default.
- W2157370650 hasConcept C78519656 @default.
- W2157370650 hasConceptScore W2157370650C100921725 @default.
- W2157370650 hasConceptScore W2157370650C107551265 @default.
- W2157370650 hasConceptScore W2157370650C108439606 @default.
- W2157370650 hasConceptScore W2157370650C120665830 @default.
- W2157370650 hasConceptScore W2157370650C121332964 @default.
- W2157370650 hasConceptScore W2157370650C127413603 @default.
- W2157370650 hasConceptScore W2157370650C15744967 @default.
- W2157370650 hasConceptScore W2157370650C166689943 @default.
- W2157370650 hasConceptScore W2157370650C192562407 @default.
- W2157370650 hasConceptScore W2157370650C204223013 @default.
- W2157370650 hasConceptScore W2157370650C24890656 @default.
- W2157370650 hasConceptScore W2157370650C2777813233 @default.
- W2157370650 hasConceptScore W2157370650C2779844322 @default.
- W2157370650 hasConceptScore W2157370650C44280652 @default.
- W2157370650 hasConceptScore W2157370650C542102704 @default.
- W2157370650 hasConceptScore W2157370650C62520636 @default.
- W2157370650 hasConceptScore W2157370650C70000540 @default.
- W2157370650 hasConceptScore W2157370650C78519656 @default.
- W2157370650 hasIssue "11" @default.
- W2157370650 hasLocation W21573706501 @default.
- W2157370650 hasOpenAccess W2157370650 @default.
- W2157370650 hasPrimaryLocation W21573706501 @default.
- W2157370650 hasRelatedWork W1833571962 @default.
- W2157370650 hasRelatedWork W1977975771 @default.
- W2157370650 hasRelatedWork W1994924814 @default.
- W2157370650 hasRelatedWork W2026775513 @default.
- W2157370650 hasRelatedWork W2029028893 @default.
- W2157370650 hasRelatedWork W2065232534 @default.
- W2157370650 hasRelatedWork W2078341930 @default.
- W2157370650 hasRelatedWork W2088701884 @default.
- W2157370650 hasRelatedWork W2139386098 @default.
- W2157370650 hasRelatedWork W2947331364 @default.
- W2157370650 hasVolume "51" @default.
- W2157370650 isParatext "false" @default.
- W2157370650 isRetracted "false" @default.
- W2157370650 magId "2157370650" @default.
- W2157370650 workType "article" @default.