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- W2157740021 abstract "The influence of RTA pre-treatments at 1250 °C on the morphology and stoichiometry of oxygen precipitates was investigated by STEM and FTIR. The morphology of the oxygen precipitates depends on the temperature of the subsequent annealing. Annealing at 800 °C results first of all in the formation of 3D dendritic precipitates while during annealing at 900 °C or 1000 °C mainly plate-like and octahedral precipitates are formed. The absorption bands of the dendritic SiOx precipitates were identified and simulated based on effective medium theory. All regular plate-like and octahedral precipitates could be well fitted assuming x=2." @default.
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- W2157740021 date "2014-08-07" @default.
- W2157740021 modified "2023-09-25" @default.
- W2157740021 title "Morphology of Oxygen Precipitates in RTA Pre-Treated Czochralski Silicon Wafers Investigated by FTIR Spectroscopy and STEM" @default.
- W2157740021 doi "https://doi.org/10.1149/06411.0071ecst" @default.
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