Matches in SemOpenAlex for { <https://semopenalex.org/work/W2157846364> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2157846364 endingPage "298" @default.
- W2157846364 startingPage "293" @default.
- W2157846364 abstract "Band lineups of high-k dielectrics such as atomic layer deposition (ALD) grown HfO2 and Al2O3 with different thicknesses on SiO2/Si stack are investigated by X-ray photoelectron spectroscopy (XPS). The band offsets at HfO2/SiO2, Al2O3/SiO2 and SiO2/Si interfaces are found to vary with physical thickness of high-k dielectric. Concepts of gap states and charge neutrality level (CNL) are employed to discuss band lineup of high-k/SiO2/Si stack. The observed XPS results are interpreted and attributed to lower CNLs of HfO2 and Al2O3 than SiO2/Si stack, indicating feasibility of gap state based theory in investigating band lineup of oxide/semiconductor and oxide/oxide heterojunctions." @default.
- W2157846364 created "2016-06-24" @default.
- W2157846364 creator A5008918891 @default.
- W2157846364 creator A5031044167 @default.
- W2157846364 creator A5043675539 @default.
- W2157846364 creator A5058696745 @default.
- W2157846364 creator A5060718181 @default.
- W2157846364 creator A5061396145 @default.
- W2157846364 creator A5082789515 @default.
- W2157846364 creator A5085012323 @default.
- W2157846364 date "2013-03-15" @default.
- W2157846364 modified "2023-10-16" @default.
- W2157846364 title "Band Lineup Issues Related with High-k/SiO2/Si Stack" @default.
- W2157846364 doi "https://doi.org/10.1149/05004.0293ecst" @default.
- W2157846364 hasPublicationYear "2013" @default.
- W2157846364 type Work @default.
- W2157846364 sameAs 2157846364 @default.
- W2157846364 citedByCount "2" @default.
- W2157846364 countsByYear W21578463642014 @default.
- W2157846364 countsByYear W21578463642015 @default.
- W2157846364 crossrefType "journal-article" @default.
- W2157846364 hasAuthorship W2157846364A5008918891 @default.
- W2157846364 hasAuthorship W2157846364A5031044167 @default.
- W2157846364 hasAuthorship W2157846364A5043675539 @default.
- W2157846364 hasAuthorship W2157846364A5058696745 @default.
- W2157846364 hasAuthorship W2157846364A5060718181 @default.
- W2157846364 hasAuthorship W2157846364A5061396145 @default.
- W2157846364 hasAuthorship W2157846364A5082789515 @default.
- W2157846364 hasAuthorship W2157846364A5085012323 @default.
- W2157846364 hasConcept C113196181 @default.
- W2157846364 hasConcept C121332964 @default.
- W2157846364 hasConcept C133386390 @default.
- W2157846364 hasConcept C16317505 @default.
- W2157846364 hasConcept C171250308 @default.
- W2157846364 hasConcept C175708663 @default.
- W2157846364 hasConcept C181966813 @default.
- W2157846364 hasConcept C185592680 @default.
- W2157846364 hasConcept C191897082 @default.
- W2157846364 hasConcept C192562407 @default.
- W2157846364 hasConcept C199360897 @default.
- W2157846364 hasConcept C2779227376 @default.
- W2157846364 hasConcept C2779851234 @default.
- W2157846364 hasConcept C41008148 @default.
- W2157846364 hasConcept C43617362 @default.
- W2157846364 hasConcept C46141821 @default.
- W2157846364 hasConcept C49040817 @default.
- W2157846364 hasConcept C69544855 @default.
- W2157846364 hasConcept C79794668 @default.
- W2157846364 hasConcept C9395851 @default.
- W2157846364 hasConceptScore W2157846364C113196181 @default.
- W2157846364 hasConceptScore W2157846364C121332964 @default.
- W2157846364 hasConceptScore W2157846364C133386390 @default.
- W2157846364 hasConceptScore W2157846364C16317505 @default.
- W2157846364 hasConceptScore W2157846364C171250308 @default.
- W2157846364 hasConceptScore W2157846364C175708663 @default.
- W2157846364 hasConceptScore W2157846364C181966813 @default.
- W2157846364 hasConceptScore W2157846364C185592680 @default.
- W2157846364 hasConceptScore W2157846364C191897082 @default.
- W2157846364 hasConceptScore W2157846364C192562407 @default.
- W2157846364 hasConceptScore W2157846364C199360897 @default.
- W2157846364 hasConceptScore W2157846364C2779227376 @default.
- W2157846364 hasConceptScore W2157846364C2779851234 @default.
- W2157846364 hasConceptScore W2157846364C41008148 @default.
- W2157846364 hasConceptScore W2157846364C43617362 @default.
- W2157846364 hasConceptScore W2157846364C46141821 @default.
- W2157846364 hasConceptScore W2157846364C49040817 @default.
- W2157846364 hasConceptScore W2157846364C69544855 @default.
- W2157846364 hasConceptScore W2157846364C79794668 @default.
- W2157846364 hasConceptScore W2157846364C9395851 @default.
- W2157846364 hasIssue "4" @default.
- W2157846364 hasLocation W21578463641 @default.
- W2157846364 hasOpenAccess W2157846364 @default.
- W2157846364 hasPrimaryLocation W21578463641 @default.
- W2157846364 hasRelatedWork W1991526314 @default.
- W2157846364 hasRelatedWork W2037491502 @default.
- W2157846364 hasRelatedWork W2042794464 @default.
- W2157846364 hasRelatedWork W2157846364 @default.
- W2157846364 hasRelatedWork W2790315434 @default.
- W2157846364 hasRelatedWork W2886203986 @default.
- W2157846364 hasRelatedWork W2965881240 @default.
- W2157846364 hasRelatedWork W3033286567 @default.
- W2157846364 hasRelatedWork W3147001040 @default.
- W2157846364 hasRelatedWork W2137964738 @default.
- W2157846364 hasVolume "50" @default.
- W2157846364 isParatext "false" @default.
- W2157846364 isRetracted "false" @default.
- W2157846364 magId "2157846364" @default.
- W2157846364 workType "article" @default.