Matches in SemOpenAlex for { <https://semopenalex.org/work/W2158220265> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2158220265 abstract "Ion-beam-induced ripple formation in Si wafers was studied by two complementary surface sensitive techniques, namely atomic force microscopy (AFM) and depth-resolved x-ray grazing incidence diffraction (GID). The formation of ripple structure at high doses $(ensuremath{sim}7mathbf{ifmmodetimeselsetexttimesfi{}}{10}^{17}phantom{rule{0.3em}{0ex}}mathrm{ions}∕{mathrm{cm}}^{2})$, starting from initiation at low doses $(ensuremath{sim}1mathbf{ifmmodetimeselsetexttimesfi{}}{10}^{17}phantom{rule{0.3em}{0ex}}mathrm{ions}∕{mathrm{cm}}^{2})$ of ion beam, is evident from AFM, while that in the buried crystalline region below a partially crystalline top layer is evident from GID study. Such ripple structure of crystalline layers in a large area formed in the subsurface region of Si wafers is probed through a nondestructive technique. The GID technique reveals that these periodically modulated wavelike buried crystalline features become highly regular and strongly correlated as one increases the Ar ion-beam energy from 60 to 100 keV. The vertical density profile obtained from the analysis of a Vineyard profile shows that the density in the upper top part of ripples is decreased to about 15% of the crystalline density. The partially crystalline top layer at low dose transforms to a completely amorphous layer for high doses, and the top morphology was found to be conformal with the underlying crystalline ripple." @default.
- W2158220265 created "2016-06-24" @default.
- W2158220265 creator A5032401632 @default.
- W2158220265 creator A5041470836 @default.
- W2158220265 creator A5056443327 @default.
- W2158220265 creator A5071913751 @default.
- W2158220265 creator A5080985742 @default.
- W2158220265 date "2004-09-27" @default.
- W2158220265 modified "2023-09-25" @default.
- W2158220265 title "Ripple structure of crystalline layers in ion-beam-induced Si wafers" @default.
- W2158220265 cites W1966026451 @default.
- W2158220265 cites W1967490555 @default.
- W2158220265 cites W1974168360 @default.
- W2158220265 cites W1996641914 @default.
- W2158220265 cites W2006949042 @default.
- W2158220265 cites W2012460201 @default.
- W2158220265 cites W2030382673 @default.
- W2158220265 cites W2032759143 @default.
- W2158220265 cites W2033482808 @default.
- W2158220265 cites W2046986693 @default.
- W2158220265 cites W2051712065 @default.
- W2158220265 cites W2070226352 @default.
- W2158220265 cites W2078862936 @default.
- W2158220265 cites W2110162640 @default.
- W2158220265 cites W2236014704 @default.
- W2158220265 cites W2499279649 @default.
- W2158220265 doi "https://doi.org/10.1103/physrevb.70.121307" @default.
- W2158220265 hasPublicationYear "2004" @default.
- W2158220265 type Work @default.
- W2158220265 sameAs 2158220265 @default.
- W2158220265 citedByCount "91" @default.
- W2158220265 countsByYear W21582202652012 @default.
- W2158220265 countsByYear W21582202652013 @default.
- W2158220265 countsByYear W21582202652014 @default.
- W2158220265 countsByYear W21582202652015 @default.
- W2158220265 countsByYear W21582202652016 @default.
- W2158220265 countsByYear W21582202652017 @default.
- W2158220265 countsByYear W21582202652018 @default.
- W2158220265 countsByYear W21582202652019 @default.
- W2158220265 countsByYear W21582202652020 @default.
- W2158220265 countsByYear W21582202652021 @default.
- W2158220265 countsByYear W21582202652022 @default.
- W2158220265 countsByYear W21582202652023 @default.
- W2158220265 crossrefType "journal-article" @default.
- W2158220265 hasAuthorship W2158220265A5032401632 @default.
- W2158220265 hasAuthorship W2158220265A5041470836 @default.
- W2158220265 hasAuthorship W2158220265A5056443327 @default.
- W2158220265 hasAuthorship W2158220265A5071913751 @default.
- W2158220265 hasAuthorship W2158220265A5080985742 @default.
- W2158220265 hasConcept C120665830 @default.
- W2158220265 hasConcept C121332964 @default.
- W2158220265 hasConcept C145148216 @default.
- W2158220265 hasConcept C160671074 @default.
- W2158220265 hasConcept C165801399 @default.
- W2158220265 hasConcept C168834538 @default.
- W2158220265 hasConcept C171250308 @default.
- W2158220265 hasConcept C184779094 @default.
- W2158220265 hasConcept C185592680 @default.
- W2158220265 hasConcept C192562407 @default.
- W2158220265 hasConcept C2779599953 @default.
- W2158220265 hasConcept C41999313 @default.
- W2158220265 hasConcept C50774322 @default.
- W2158220265 hasConcept C56052488 @default.
- W2158220265 hasConcept C62520636 @default.
- W2158220265 hasConcept C8010536 @default.
- W2158220265 hasConceptScore W2158220265C120665830 @default.
- W2158220265 hasConceptScore W2158220265C121332964 @default.
- W2158220265 hasConceptScore W2158220265C145148216 @default.
- W2158220265 hasConceptScore W2158220265C160671074 @default.
- W2158220265 hasConceptScore W2158220265C165801399 @default.
- W2158220265 hasConceptScore W2158220265C168834538 @default.
- W2158220265 hasConceptScore W2158220265C171250308 @default.
- W2158220265 hasConceptScore W2158220265C184779094 @default.
- W2158220265 hasConceptScore W2158220265C185592680 @default.
- W2158220265 hasConceptScore W2158220265C192562407 @default.
- W2158220265 hasConceptScore W2158220265C2779599953 @default.
- W2158220265 hasConceptScore W2158220265C41999313 @default.
- W2158220265 hasConceptScore W2158220265C50774322 @default.
- W2158220265 hasConceptScore W2158220265C56052488 @default.
- W2158220265 hasConceptScore W2158220265C62520636 @default.
- W2158220265 hasConceptScore W2158220265C8010536 @default.
- W2158220265 hasIssue "12" @default.
- W2158220265 hasLocation W21582202651 @default.
- W2158220265 hasOpenAccess W2158220265 @default.
- W2158220265 hasPrimaryLocation W21582202651 @default.
- W2158220265 hasRelatedWork W1972647723 @default.
- W2158220265 hasRelatedWork W1990089368 @default.
- W2158220265 hasRelatedWork W2049084861 @default.
- W2158220265 hasRelatedWork W2055214643 @default.
- W2158220265 hasRelatedWork W2065018915 @default.
- W2158220265 hasRelatedWork W2075279587 @default.
- W2158220265 hasRelatedWork W2087643239 @default.
- W2158220265 hasRelatedWork W2094481310 @default.
- W2158220265 hasRelatedWork W2326012320 @default.
- W2158220265 hasRelatedWork W4236176459 @default.
- W2158220265 hasVolume "70" @default.
- W2158220265 isParatext "false" @default.
- W2158220265 isRetracted "false" @default.
- W2158220265 magId "2158220265" @default.
- W2158220265 workType "article" @default.