Matches in SemOpenAlex for { <https://semopenalex.org/work/W2158468566> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2158468566 endingPage "203" @default.
- W2158468566 startingPage "197" @default.
- W2158468566 abstract "Titanium nitride (TiN) layers are currently used both as diffusion barriers and as glue layers for poorly adhering materials in the semiconductor industry. Until recently titanium nitride was deposited by PVD method with a poor step coverage. Some TiN CVD methods were developed but present drawbacks (chlorides contamination, high resistivity). A new CVD process is now developed with a desirable step coverage and a low resistivity. This one consists of a sequential OMCVD-plasma treatment process allowing a deposition of films with resistivity lower than 300 /spl mu//spl Omega/.cm. The present paper deals with TiN performances as barrier materials for copper integration in dual damascene architecture." @default.
- W2158468566 created "2016-06-24" @default.
- W2158468566 creator A5019931430 @default.
- W2158468566 creator A5022360089 @default.
- W2158468566 creator A5029897141 @default.
- W2158468566 creator A5032571182 @default.
- W2158468566 creator A5037806164 @default.
- W2158468566 creator A5058705886 @default.
- W2158468566 creator A5068988716 @default.
- W2158468566 creator A5084351777 @default.
- W2158468566 date "1997-11-01" @default.
- W2158468566 modified "2023-09-26" @default.
- W2158468566 title "OMCVD TiN diffusion barrier for copper contact and via/interconnects structures" @default.
- W2158468566 cites W1996030118 @default.
- W2158468566 cites W2005611043 @default.
- W2158468566 cites W2041866280 @default.
- W2158468566 doi "https://doi.org/10.1016/s0167-9317(97)00112-3" @default.
- W2158468566 hasPublicationYear "1997" @default.
- W2158468566 type Work @default.
- W2158468566 sameAs 2158468566 @default.
- W2158468566 citedByCount "3" @default.
- W2158468566 crossrefType "journal-article" @default.
- W2158468566 hasAuthorship W2158468566A5019931430 @default.
- W2158468566 hasAuthorship W2158468566A5022360089 @default.
- W2158468566 hasAuthorship W2158468566A5029897141 @default.
- W2158468566 hasAuthorship W2158468566A5032571182 @default.
- W2158468566 hasAuthorship W2158468566A5037806164 @default.
- W2158468566 hasAuthorship W2158468566A5058705886 @default.
- W2158468566 hasAuthorship W2158468566A5068988716 @default.
- W2158468566 hasAuthorship W2158468566A5084351777 @default.
- W2158468566 hasConcept C121332964 @default.
- W2158468566 hasConcept C171250308 @default.
- W2158468566 hasConcept C185592680 @default.
- W2158468566 hasConcept C191897082 @default.
- W2158468566 hasConcept C192562407 @default.
- W2158468566 hasConcept C2778836790 @default.
- W2158468566 hasConcept C2779227376 @default.
- W2158468566 hasConcept C2779833192 @default.
- W2158468566 hasConcept C525849907 @default.
- W2158468566 hasConcept C544778455 @default.
- W2158468566 hasConcept C69357855 @default.
- W2158468566 hasConcept C97355855 @default.
- W2158468566 hasConceptScore W2158468566C121332964 @default.
- W2158468566 hasConceptScore W2158468566C171250308 @default.
- W2158468566 hasConceptScore W2158468566C185592680 @default.
- W2158468566 hasConceptScore W2158468566C191897082 @default.
- W2158468566 hasConceptScore W2158468566C192562407 @default.
- W2158468566 hasConceptScore W2158468566C2778836790 @default.
- W2158468566 hasConceptScore W2158468566C2779227376 @default.
- W2158468566 hasConceptScore W2158468566C2779833192 @default.
- W2158468566 hasConceptScore W2158468566C525849907 @default.
- W2158468566 hasConceptScore W2158468566C544778455 @default.
- W2158468566 hasConceptScore W2158468566C69357855 @default.
- W2158468566 hasConceptScore W2158468566C97355855 @default.
- W2158468566 hasLocation W21584685661 @default.
- W2158468566 hasOpenAccess W2158468566 @default.
- W2158468566 hasPrimaryLocation W21584685661 @default.
- W2158468566 hasRelatedWork W1954199043 @default.
- W2158468566 hasRelatedWork W1989054289 @default.
- W2158468566 hasRelatedWork W2013055614 @default.
- W2158468566 hasRelatedWork W2076677140 @default.
- W2158468566 hasRelatedWork W2126119008 @default.
- W2158468566 hasRelatedWork W2167969269 @default.
- W2158468566 hasRelatedWork W2376889272 @default.
- W2158468566 hasRelatedWork W2473881501 @default.
- W2158468566 hasRelatedWork W2998419217 @default.
- W2158468566 hasRelatedWork W3018979731 @default.
- W2158468566 hasVolume "37-38" @default.
- W2158468566 isParatext "false" @default.
- W2158468566 isRetracted "false" @default.
- W2158468566 magId "2158468566" @default.
- W2158468566 workType "article" @default.