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- W2158520242 abstract "An optical heterodyne profilometer breadboard as been developed and demonstrated with surface roughness measurement sensitivity to 0.1 Å. Optical and electronic common-mode rejection techniques were employed in the optical heterodyne precision phase measurement scheme to resolve the optical phase to one part in thirty thousand. Vibration-induced optical phase jitter in the system was nearly eliminated by these common-mode rejection techniques. This non-contact profilometer is capable of characterizing mirror surfaces not limited only to flat and/or highly reflective surfaces. Concaved surfaces such as the x-ray mirrors for the Advanced X-ray Astrophysical Facility (AXAF) may be characterized as well. Several mirror samples have been characterized with the optical heterodyne profil-ometer which include two x-ray mirror samples. Roughness measurement results on the x-ray mirror samples have been compared with those measured by other methods." @default.
- W2158520242 created "2016-06-24" @default.
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- W2158520242 date "1983-11-15" @default.
- W2158520242 modified "2023-09-26" @default.
- W2158520242 title "<title>Optical Heterodyne Profilometer</title>" @default.
- W2158520242 doi "https://doi.org/10.1117/12.936341" @default.
- W2158520242 hasPublicationYear "1983" @default.
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