Matches in SemOpenAlex for { <https://semopenalex.org/work/W2158546113> ?p ?o ?g. }
Showing items 1 to 48 of
48
with 100 items per page.
- W2158546113 abstract "With advances in micromachining and the consequent growing sophistication of microstructures, emphasis is increasingly being laid on the design and realization of complete microsystems. In this paper we show some possible combinations of micromachining technologies to build microsystems for applications in photonics, nanoscience, bio-electrochemical systems and micromechanics. The common point of such a large range of devices is their fabrication technology, which has developed from the basic integrated circuit techniques into a wide spectrum of specific micromachining technologies. This article gives an overview of established and newer microfabrication technologies and their application to the construction of some chosen microsystems." @default.
- W2158546113 created "2016-06-24" @default.
- W2158546113 creator A5002122862 @default.
- W2158546113 date "1997-09-05" @default.
- W2158546113 modified "2023-09-23" @default.
- W2158546113 title "<title>Microfabrication technologies for microsystems</title>" @default.
- W2158546113 doi "https://doi.org/10.1117/12.284466" @default.
- W2158546113 hasPublicationYear "1997" @default.
- W2158546113 type Work @default.
- W2158546113 sameAs 2158546113 @default.
- W2158546113 citedByCount "1" @default.
- W2158546113 crossrefType "proceedings-article" @default.
- W2158546113 hasAuthorship W2158546113A5002122862 @default.
- W2158546113 hasConcept C136525101 @default.
- W2158546113 hasConcept C142724271 @default.
- W2158546113 hasConcept C151054161 @default.
- W2158546113 hasConcept C171250308 @default.
- W2158546113 hasConcept C192562407 @default.
- W2158546113 hasConcept C204787440 @default.
- W2158546113 hasConcept C41008148 @default.
- W2158546113 hasConcept C527607 @default.
- W2158546113 hasConcept C71924100 @default.
- W2158546113 hasConceptScore W2158546113C136525101 @default.
- W2158546113 hasConceptScore W2158546113C142724271 @default.
- W2158546113 hasConceptScore W2158546113C151054161 @default.
- W2158546113 hasConceptScore W2158546113C171250308 @default.
- W2158546113 hasConceptScore W2158546113C192562407 @default.
- W2158546113 hasConceptScore W2158546113C204787440 @default.
- W2158546113 hasConceptScore W2158546113C41008148 @default.
- W2158546113 hasConceptScore W2158546113C527607 @default.
- W2158546113 hasConceptScore W2158546113C71924100 @default.
- W2158546113 hasLocation W21585461131 @default.
- W2158546113 hasOpenAccess W2158546113 @default.
- W2158546113 hasPrimaryLocation W21585461131 @default.
- W2158546113 hasRelatedWork W2004263525 @default.
- W2158546113 hasRelatedWork W2034049226 @default.
- W2158546113 hasRelatedWork W2116194108 @default.
- W2158546113 hasRelatedWork W2128103566 @default.
- W2158546113 hasRelatedWork W2498731349 @default.
- W2158546113 hasRelatedWork W2569710231 @default.
- W2158546113 hasRelatedWork W4242982148 @default.
- W2158546113 hasRelatedWork W4253850484 @default.
- W2158546113 hasRelatedWork W4302328227 @default.
- W2158546113 hasRelatedWork W600213277 @default.
- W2158546113 isParatext "false" @default.
- W2158546113 isRetracted "false" @default.
- W2158546113 magId "2158546113" @default.
- W2158546113 workType "article" @default.