FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2158713024> ?p ?o ?g. }

• W2158713024 endingPage "8724" @default.
• W2158713024 startingPage "8718" @default.
• W2158713024 abstract "Amorphous and polycrystalline zirconium oxide thin films have been deposited by reactive rf magnetron sputtering in a mixed argon/oxygen or pure oxygen atmosphere with no intentional heating of the substrate. The films were characterized by high-resolution transmission electron microscopy (HR-TEM), atomic force microscopy (AFM), spectroscopic ellipsometry (SE), and capacitance versus voltage (C–V) measurements to investigate the variation of structure, surface morphology, thickness of SiO2-like interfacial layer as well as dielectric characteristics with different oxygen partial pressures. The films deposited at low oxygen partial pressures (less than 15%) are amorphous and dense with a smooth surface. In contrast, the films prepared at an oxygen partial pressure higher than 73% are crystallized with the microstructure changing from the mixture of monoclinic and tetragonal phases to a single monoclinic structure. The film structural transition is believed to be consequences of decrease in the oxygen vacancy concentration in the film and of increase of the energetically neutral particles in the plasma due to an increased oxygen partial pressure. SE measurements showed that significant interfacial SiO2 growth has taken place above approximately 51%. The best C–V results in terms of relative dielectric constant values are obtained for thin films prepared at an oxygen partial pressure of 15%." @default.
• W2158713024 created "2016-06-24" @default.
• W2158713024 creator A5027886643 @default.
• W2158713024 creator A5053167905 @default.
• W2158713024 creator A5084562837 @default.
• W2158713024 creator A5088611206 @default.
• W2158713024 date "2007-08-01" @default.
• W2158713024 modified "2023-10-10" @default.
• W2158713024 title "Effect of O2 gas partial pressure on structures and dielectric characteristics of rf sputtered ZrO2 thin films" @default.
• W2158713024 cites W1674013855 @default.
• W2158713024 cites W1965159470 @default.
• W2158713024 cites W1980603661 @default.
• W2158713024 cites W1981247648 @default.
• W2158713024 cites W1982546487 @default.
• W2158713024 cites W1984632406 @default.
• W2158713024 cites W1995612203 @default.
• W2158713024 cites W2001372750 @default.
• W2158713024 cites W2003645630 @default.
• W2158713024 cites W2015107469 @default.
• W2158713024 cites W2031983718 @default.
• W2158713024 cites W2033411822 @default.
• W2158713024 cites W2033496867 @default.
• W2158713024 cites W2035285737 @default.
• W2158713024 cites W2035890288 @default.
• W2158713024 cites W2050836674 @default.
• W2158713024 cites W2055280556 @default.
• W2158713024 cites W2068070765 @default.
• W2158713024 cites W2088471236 @default.
• W2158713024 cites W2089776572 @default.
• W2158713024 cites W2127193910 @default.
• W2158713024 cites W2148454783 @default.
• W2158713024 cites W2161302232 @default.
• W2158713024 doi "https://doi.org/10.1016/j.apsusc.2007.04.054" @default.
• W2158713024 hasPublicationYear "2007" @default.
• W2158713024 type Work @default.
• W2158713024 sameAs 2158713024 @default.
• W2158713024 citedByCount "37" @default.
• W2158713024 countsByYear W21587130242012 @default.
• W2158713024 countsByYear W21587130242013 @default.
• W2158713024 countsByYear W21587130242014 @default.
• W2158713024 countsByYear W21587130242015 @default.
• W2158713024 countsByYear W21587130242016 @default.
• W2158713024 countsByYear W21587130242018 @default.
• W2158713024 countsByYear W21587130242019 @default.
• W2158713024 countsByYear W21587130242020 @default.
• W2158713024 countsByYear W21587130242021 @default.
• W2158713024 countsByYear W21587130242022 @default.
• W2158713024 crossrefType "journal-article" @default.
• W2158713024 hasAuthorship W2158713024A5027886643 @default.
• W2158713024 hasAuthorship W2158713024A5053167905 @default.
• W2158713024 hasAuthorship W2158713024A5084562837 @default.
• W2158713024 hasAuthorship W2158713024A5088611206 @default.
• W2158713024 hasConcept C113196181 @default.
• W2158713024 hasConcept C115624301 @default.
• W2158713024 hasConcept C133386390 @default.
• W2158713024 hasConcept C137637335 @default.
• W2158713024 hasConcept C159985019 @default.
• W2158713024 hasConcept C171250308 @default.
• W2158713024 hasConcept C178790620 @default.
• W2158713024 hasConcept C18293161 @default.
• W2158713024 hasConcept C185592680 @default.
• W2158713024 hasConcept C19067145 @default.
• W2158713024 hasConcept C191897082 @default.
• W2158713024 hasConcept C192562407 @default.
• W2158713024 hasConcept C22423302 @default.
• W2158713024 hasConcept C43617362 @default.
• W2158713024 hasConcept C49040817 @default.
• W2158713024 hasConcept C540031477 @default.
• W2158713024 hasConcept C547737533 @default.
• W2158713024 hasConcept C56052488 @default.
• W2158713024 hasConcept C61276311 @default.
• W2158713024 hasConcept C61427134 @default.
• W2158713024 hasConcept C68463220 @default.
• W2158713024 hasConcept C8010536 @default.
• W2158713024 hasConcept C87976508 @default.
• W2158713024 hasConceptScore W2158713024C113196181 @default.
• W2158713024 hasConceptScore W2158713024C115624301 @default.
• W2158713024 hasConceptScore W2158713024C133386390 @default.
• W2158713024 hasConceptScore W2158713024C137637335 @default.
• W2158713024 hasConceptScore W2158713024C159985019 @default.
• W2158713024 hasConceptScore W2158713024C171250308 @default.
• W2158713024 hasConceptScore W2158713024C178790620 @default.
• W2158713024 hasConceptScore W2158713024C18293161 @default.
• W2158713024 hasConceptScore W2158713024C185592680 @default.
• W2158713024 hasConceptScore W2158713024C19067145 @default.
• W2158713024 hasConceptScore W2158713024C191897082 @default.
• W2158713024 hasConceptScore W2158713024C192562407 @default.
• W2158713024 hasConceptScore W2158713024C22423302 @default.
• W2158713024 hasConceptScore W2158713024C43617362 @default.
• W2158713024 hasConceptScore W2158713024C49040817 @default.
• W2158713024 hasConceptScore W2158713024C540031477 @default.
• W2158713024 hasConceptScore W2158713024C547737533 @default.
• W2158713024 hasConceptScore W2158713024C56052488 @default.
• W2158713024 hasConceptScore W2158713024C61276311 @default.
• W2158713024 hasConceptScore W2158713024C61427134 @default.
• W2158713024 hasConceptScore W2158713024C68463220 @default.
• W2158713024 hasConceptScore W2158713024C8010536 @default.
• W2158713024 hasConceptScore W2158713024C87976508 @default.

• next