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- W2158865929 abstract "Abstract : This paper concerns the characteristics of ion implanters for fabrication of electronic devices. High voltage implanters have been designed for implanting ions deeper into semiconductor materials. They are now standardized at 400 keV." @default.
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- W2158865929 date "1984-06-01" @default.
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- W2158865929 title "Characteristics of Ion Implanters for Fabrication of Electronic Devices" @default.
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