Matches in SemOpenAlex for { <https://semopenalex.org/work/W2158959265> ?p ?o ?g. }
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- W2158959265 endingPage "C317" @default.
- W2158959265 startingPage "C317" @default.
- W2158959265 abstract "Ru thin films were prepared by metallorganic chemical vapor deposition using a cyclopentadienyl-propyl-cyclopentadienylruthenium(II) precursor and The nucleation and deposition behavior, thermal stability of the film surface, reaction at the Ru/TiN interface, and the stresses of the Ru thin films were investigated. The films consisted of single phase metallic Ru under all deposition conditions and showed an electrical resistivity as low as 12 μΩ cm. The Ru thin films had a negligible oxygen content. Therefore, the interface between Ru and TiN was not changed after annealing at 600°C under a atmosphere. However, the poor nucleation property especially on a surface resulted in a rough surface morphology. It was found that the stress of the Ru thin film decreased as the deposition temperature and growth rate increased. The deposition behavior and physical properties of the films were investigated for use as an electrode in a metal-insulator-metal capacitor in future generation dynamic random access memory devices. © 2002 The Electrochemical Society. All rights reserved." @default.
- W2158959265 created "2016-06-24" @default.
- W2158959265 creator A5027075775 @default.
- W2158959265 creator A5039113095 @default.
- W2158959265 creator A5049220044 @default.
- W2158959265 creator A5058469236 @default.
- W2158959265 date "2002-01-01" @default.
- W2158959265 modified "2023-10-16" @default.
- W2158959265 title "Metallorganic Chemical Vapor Deposition of Ru Films Using Cyclopentadienyl-Propylcyclopentadienylruthenium(II) and Oxygen" @default.
- W2158959265 cites W1966417765 @default.
- W2158959265 cites W1970378581 @default.
- W2158959265 cites W1975978561 @default.
- W2158959265 cites W1998339137 @default.
- W2158959265 cites W2052137108 @default.
- W2158959265 cites W2060430942 @default.
- W2158959265 cites W2064389980 @default.
- W2158959265 cites W2077886792 @default.
- W2158959265 cites W2083310674 @default.
- W2158959265 cites W2088798929 @default.
- W2158959265 cites W2133077969 @default.
- W2158959265 cites W2144410113 @default.
- W2158959265 cites W2168342646 @default.
- W2158959265 cites W2335124954 @default.
- W2158959265 cites W2357107353 @default.
- W2158959265 doi "https://doi.org/10.1149/1.1471547" @default.
- W2158959265 hasPublicationYear "2002" @default.
- W2158959265 type Work @default.
- W2158959265 sameAs 2158959265 @default.
- W2158959265 citedByCount "28" @default.
- W2158959265 countsByYear W21589592652014 @default.
- W2158959265 countsByYear W21589592652017 @default.
- W2158959265 countsByYear W21589592652023 @default.
- W2158959265 crossrefType "journal-article" @default.
- W2158959265 hasAuthorship W2158959265A5027075775 @default.
- W2158959265 hasAuthorship W2158959265A5039113095 @default.
- W2158959265 hasAuthorship W2158959265A5049220044 @default.
- W2158959265 hasAuthorship W2158959265A5058469236 @default.
- W2158959265 hasConcept C127413603 @default.
- W2158959265 hasConcept C151730666 @default.
- W2158959265 hasConcept C171250308 @default.
- W2158959265 hasConcept C178790620 @default.
- W2158959265 hasConcept C179104552 @default.
- W2158959265 hasConcept C185592680 @default.
- W2158959265 hasConcept C19067145 @default.
- W2158959265 hasConcept C191897082 @default.
- W2158959265 hasConcept C192562407 @default.
- W2158959265 hasConcept C2777855556 @default.
- W2158959265 hasConcept C2816523 @default.
- W2158959265 hasConcept C42360764 @default.
- W2158959265 hasConcept C525849907 @default.
- W2158959265 hasConcept C57410435 @default.
- W2158959265 hasConcept C61048295 @default.
- W2158959265 hasConcept C64297162 @default.
- W2158959265 hasConcept C75937256 @default.
- W2158959265 hasConcept C86803240 @default.
- W2158959265 hasConceptScore W2158959265C127413603 @default.
- W2158959265 hasConceptScore W2158959265C151730666 @default.
- W2158959265 hasConceptScore W2158959265C171250308 @default.
- W2158959265 hasConceptScore W2158959265C178790620 @default.
- W2158959265 hasConceptScore W2158959265C179104552 @default.
- W2158959265 hasConceptScore W2158959265C185592680 @default.
- W2158959265 hasConceptScore W2158959265C19067145 @default.
- W2158959265 hasConceptScore W2158959265C191897082 @default.
- W2158959265 hasConceptScore W2158959265C192562407 @default.
- W2158959265 hasConceptScore W2158959265C2777855556 @default.
- W2158959265 hasConceptScore W2158959265C2816523 @default.
- W2158959265 hasConceptScore W2158959265C42360764 @default.
- W2158959265 hasConceptScore W2158959265C525849907 @default.
- W2158959265 hasConceptScore W2158959265C57410435 @default.
- W2158959265 hasConceptScore W2158959265C61048295 @default.
- W2158959265 hasConceptScore W2158959265C64297162 @default.
- W2158959265 hasConceptScore W2158959265C75937256 @default.
- W2158959265 hasConceptScore W2158959265C86803240 @default.
- W2158959265 hasIssue "6" @default.
- W2158959265 hasLocation W21589592651 @default.
- W2158959265 hasOpenAccess W2158959265 @default.
- W2158959265 hasPrimaryLocation W21589592651 @default.
- W2158959265 hasRelatedWork W1148372108 @default.
- W2158959265 hasRelatedWork W2003761337 @default.
- W2158959265 hasRelatedWork W2004090287 @default.
- W2158959265 hasRelatedWork W2040310861 @default.
- W2158959265 hasRelatedWork W2073483854 @default.
- W2158959265 hasRelatedWork W2273391071 @default.
- W2158959265 hasRelatedWork W2312192749 @default.
- W2158959265 hasRelatedWork W2332218522 @default.
- W2158959265 hasRelatedWork W2397115409 @default.
- W2158959265 hasRelatedWork W2492470561 @default.
- W2158959265 hasVolume "149" @default.
- W2158959265 isParatext "false" @default.
- W2158959265 isRetracted "false" @default.
- W2158959265 magId "2158959265" @default.
- W2158959265 workType "article" @default.