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- W2159018110 abstract "This paper presents test and characterization of various thin film contact materials for reliable high power RF- MEMS switches. We selected Au, Pt, Ir, and AuPt alloys for contact materials and fundamentally studied on contact phenomena and reliability of similar or dissimilar contacts using a contact measurement apparatus at high current condition. We also investigated the electrical contact behavior of the MEMS switches. From these studies, Au-to-Pt, Pt-to-Pt and Au-to-Ir contact showed reliable characteristics for the high power RF-MEMS switches." @default.
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- W2159018110 date "2007-01-01" @default.
- W2159018110 modified "2023-09-22" @default.
- W2159018110 title "Contact materials and reliability for high power RF-MEMS switches" @default.
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- W2159018110 doi "https://doi.org/10.1109/memsys.2007.4433055" @default.
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