Matches in SemOpenAlex for { <https://semopenalex.org/work/W2159033085> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2159033085 endingPage "293" @default.
- W2159033085 startingPage "291" @default.
- W2159033085 abstract "A CMOS-process-compatible backside inductively coupled-plasma (ICP) dry etching technology to form deep trenches underneath the inductors of RF ICs is developed to enhance the performance of RF ICs with on-chip inductors. A 1-12.6-GHz CMOS distributed amplifier (DA) was designed and implemented in a standard CMOS process. The DA exhibits good input 1-dB compression point (P/sub 1 dB/) of -2 dBm and input third intercept point of 7 dBm both at 2.4 and 5.8 GHz. The authors demonstrate that a significant improvement in power gain (S/sub 21/) and noise figure (NF) can be achieved by conducting the proposed backside ICP dry etching to selectively remove the silicon underneath the inductors of the DA. The result shows that a 1.06-dB increase in S/sub 21/ (from 9.7 to 10.76 dB) and a 0.87-dB decrease (from 5.51 to 4.64 dB) in NF are achieved at 5.8 GHz mainly due to the improvement of the quality factor of the inductors in the DA. This means that this backside ICP dry-etching technique is very promising for system-on-a-chip applications." @default.
- W2159033085 created "2016-06-24" @default.
- W2159033085 creator A5006733867 @default.
- W2159033085 creator A5023099437 @default.
- W2159033085 creator A5073280340 @default.
- W2159033085 creator A5085142676 @default.
- W2159033085 date "2006-04-01" @default.
- W2159033085 modified "2023-10-18" @default.
- W2159033085 title "A micromachined CMOS distributed amplifier by CMOS compatible ICP deep-trench technology" @default.
- W2159033085 cites W1519675226 @default.
- W2159033085 cites W2021742152 @default.
- W2159033085 cites W2038595430 @default.
- W2159033085 cites W2099415942 @default.
- W2159033085 cites W2100779054 @default.
- W2159033085 cites W2103257449 @default.
- W2159033085 cites W2104769399 @default.
- W2159033085 cites W2105514227 @default.
- W2159033085 cites W2121698306 @default.
- W2159033085 cites W2125377543 @default.
- W2159033085 cites W2125547369 @default.
- W2159033085 cites W2148976910 @default.
- W2159033085 cites W2167004581 @default.
- W2159033085 cites W2171811183 @default.
- W2159033085 cites W2788994432 @default.
- W2159033085 doi "https://doi.org/10.1109/led.2006.871857" @default.
- W2159033085 hasPublicationYear "2006" @default.
- W2159033085 type Work @default.
- W2159033085 sameAs 2159033085 @default.
- W2159033085 citedByCount "25" @default.
- W2159033085 countsByYear W21590330852012 @default.
- W2159033085 countsByYear W21590330852015 @default.
- W2159033085 countsByYear W21590330852019 @default.
- W2159033085 crossrefType "journal-article" @default.
- W2159033085 hasAuthorship W2159033085A5006733867 @default.
- W2159033085 hasAuthorship W2159033085A5023099437 @default.
- W2159033085 hasAuthorship W2159033085A5073280340 @default.
- W2159033085 hasAuthorship W2159033085A5085142676 @default.
- W2159033085 hasConcept C100460472 @default.
- W2159033085 hasConcept C107187091 @default.
- W2159033085 hasConcept C112806910 @default.
- W2159033085 hasConcept C119599485 @default.
- W2159033085 hasConcept C121332964 @default.
- W2159033085 hasConcept C127413603 @default.
- W2159033085 hasConcept C1291036 @default.
- W2159033085 hasConcept C144534570 @default.
- W2159033085 hasConcept C165801399 @default.
- W2159033085 hasConcept C171250308 @default.
- W2159033085 hasConcept C187725362 @default.
- W2159033085 hasConcept C192562407 @default.
- W2159033085 hasConcept C194257627 @default.
- W2159033085 hasConcept C2779227376 @default.
- W2159033085 hasConcept C46362747 @default.
- W2159033085 hasConcept C49040817 @default.
- W2159033085 hasConcept C62520636 @default.
- W2159033085 hasConcept C82706917 @default.
- W2159033085 hasConcept C95974651 @default.
- W2159033085 hasConcept C97126364 @default.
- W2159033085 hasConceptScore W2159033085C100460472 @default.
- W2159033085 hasConceptScore W2159033085C107187091 @default.
- W2159033085 hasConceptScore W2159033085C112806910 @default.
- W2159033085 hasConceptScore W2159033085C119599485 @default.
- W2159033085 hasConceptScore W2159033085C121332964 @default.
- W2159033085 hasConceptScore W2159033085C127413603 @default.
- W2159033085 hasConceptScore W2159033085C1291036 @default.
- W2159033085 hasConceptScore W2159033085C144534570 @default.
- W2159033085 hasConceptScore W2159033085C165801399 @default.
- W2159033085 hasConceptScore W2159033085C171250308 @default.
- W2159033085 hasConceptScore W2159033085C187725362 @default.
- W2159033085 hasConceptScore W2159033085C192562407 @default.
- W2159033085 hasConceptScore W2159033085C194257627 @default.
- W2159033085 hasConceptScore W2159033085C2779227376 @default.
- W2159033085 hasConceptScore W2159033085C46362747 @default.
- W2159033085 hasConceptScore W2159033085C49040817 @default.
- W2159033085 hasConceptScore W2159033085C62520636 @default.
- W2159033085 hasConceptScore W2159033085C82706917 @default.
- W2159033085 hasConceptScore W2159033085C95974651 @default.
- W2159033085 hasConceptScore W2159033085C97126364 @default.
- W2159033085 hasIssue "4" @default.
- W2159033085 hasLocation W21590330851 @default.
- W2159033085 hasOpenAccess W2159033085 @default.
- W2159033085 hasPrimaryLocation W21590330851 @default.
- W2159033085 hasRelatedWork W1592028115 @default.
- W2159033085 hasRelatedWork W1986616649 @default.
- W2159033085 hasRelatedWork W1989316078 @default.
- W2159033085 hasRelatedWork W2012702177 @default.
- W2159033085 hasRelatedWork W2034252264 @default.
- W2159033085 hasRelatedWork W2042618067 @default.
- W2159033085 hasRelatedWork W2144663849 @default.
- W2159033085 hasRelatedWork W2159033085 @default.
- W2159033085 hasRelatedWork W2159397249 @default.
- W2159033085 hasRelatedWork W2211371966 @default.
- W2159033085 hasVolume "27" @default.
- W2159033085 isParatext "false" @default.
- W2159033085 isRetracted "false" @default.
- W2159033085 magId "2159033085" @default.
- W2159033085 workType "article" @default.