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• W2159133834 abstract "The demanding requirements for low power devices are stimulating new technological schemes. Cluster and cold implants have arisen as new strategies for dopant incorporation oriented to the formation of amorphous regions with reduced end-of-range defects. In this work we have used different atomistic simulation techniques to study the phenomena involved in these types of implant. The basis for the enhancement of amorphization in cluster implants is the increase of damage formation by a cooperative effect of multiple simultaneous atoms, while cold implants favor damage accumulation by increasing the lifetime of generated damage. We have also characterized the influence of Si surface on damage generation and recombination. We have found that in the vicinity of the surface damage generation is enhanced and generated damage is more stable than in bulk. As a result the amorphization threshold dose is reduced in ultra-low energy implants and the regrowth of ultra-thin body Si devices becomes more difficult." @default.
• W2159133834 created "2016-06-24" @default.
• W2159133834 creator A5009081189 @default.
• W2159133834 creator A5050815010 @default.
• W2159133834 creator A5052587441 @default.
• W2159133834 creator A5061678258 @default.
• W2159133834 creator A5075379871 @default.
• W2159133834 date "2011-06-01" @default.
• W2159133834 modified "2023-09-24" @default.
• W2159133834 title "Modeling of advanced ion implantation technologies in semiconductors" @default.
• W2159133834 cites W1963549980 @default.
• W2159133834 cites W1972373751 @default.
• W2159133834 cites W1985463741 @default.
• W2159133834 cites W1999553457 @default.
• W2159133834 cites W2008169014 @default.
• W2159133834 cites W2012557762 @default.
• W2159133834 cites W2017978370 @default.
• W2159133834 cites W2028420647 @default.
• W2159133834 cites W2030987799 @default.
• W2159133834 cites W2047550087 @default.
• W2159133834 cites W2059099283 @default.
• W2159133834 cites W2069144385 @default.
• W2159133834 cites W2072372908 @default.
• W2159133834 cites W2079069264 @default.
• W2159133834 cites W2103075252 @default.
• W2159133834 cites W2152602130 @default.
• W2159133834 doi "https://doi.org/10.1109/iwjt.2011.5969995" @default.
• W2159133834 hasPublicationYear "2011" @default.
• W2159133834 type Work @default.
• W2159133834 sameAs 2159133834 @default.
• W2159133834 citedByCount "1" @default.
• W2159133834 countsByYear W21591338342019 @default.
• W2159133834 crossrefType "proceedings-article" @default.
• W2159133834 hasAuthorship W2159133834A5009081189 @default.
• W2159133834 hasAuthorship W2159133834A5050815010 @default.
• W2159133834 hasAuthorship W2159133834A5052587441 @default.
• W2159133834 hasAuthorship W2159133834A5061678258 @default.
• W2159133834 hasAuthorship W2159133834A5075379871 @default.
• W2159133834 hasConcept C108225325 @default.
• W2159133834 hasConcept C127413603 @default.
• W2159133834 hasConcept C145148216 @default.
• W2159133834 hasConcept C164866538 @default.
• W2159133834 hasConcept C171250308 @default.
• W2159133834 hasConcept C178790620 @default.
• W2159133834 hasConcept C185592680 @default.
• W2159133834 hasConcept C191952053 @default.
• W2159133834 hasConcept C192562407 @default.
• W2159133834 hasConcept C199360897 @default.
• W2159133834 hasConcept C2779227376 @default.
• W2159133834 hasConcept C41008148 @default.
• W2159133834 hasConcept C41823505 @default.
• W2159133834 hasConcept C49040817 @default.
• W2159133834 hasConcept C56052488 @default.
• W2159133834 hasConcept C57863236 @default.
• W2159133834 hasConcept C61696701 @default.
• W2159133834 hasConcept C79635011 @default.
• W2159133834 hasConcept C8010536 @default.
• W2159133834 hasConceptScore W2159133834C108225325 @default.
• W2159133834 hasConceptScore W2159133834C127413603 @default.
• W2159133834 hasConceptScore W2159133834C145148216 @default.
• W2159133834 hasConceptScore W2159133834C164866538 @default.
• W2159133834 hasConceptScore W2159133834C171250308 @default.
• W2159133834 hasConceptScore W2159133834C178790620 @default.
• W2159133834 hasConceptScore W2159133834C185592680 @default.
• W2159133834 hasConceptScore W2159133834C191952053 @default.
• W2159133834 hasConceptScore W2159133834C192562407 @default.
• W2159133834 hasConceptScore W2159133834C199360897 @default.
• W2159133834 hasConceptScore W2159133834C2779227376 @default.
• W2159133834 hasConceptScore W2159133834C41008148 @default.
• W2159133834 hasConceptScore W2159133834C41823505 @default.
• W2159133834 hasConceptScore W2159133834C49040817 @default.
• W2159133834 hasConceptScore W2159133834C56052488 @default.
• W2159133834 hasConceptScore W2159133834C57863236 @default.
• W2159133834 hasConceptScore W2159133834C61696701 @default.
• W2159133834 hasConceptScore W2159133834C79635011 @default.
• W2159133834 hasConceptScore W2159133834C8010536 @default.
• W2159133834 hasLocation W21591338341 @default.
• W2159133834 hasOpenAccess W2159133834 @default.
• W2159133834 hasPrimaryLocation W21591338341 @default.
• W2159133834 hasRelatedWork W1529518426 @default.
• W2159133834 hasRelatedWork W1536374408 @default.
• W2159133834 hasRelatedWork W1826884433 @default.
• W2159133834 hasRelatedWork W1966788774 @default.
• W2159133834 hasRelatedWork W1973286738 @default.
• W2159133834 hasRelatedWork W1980398462 @default.
• W2159133834 hasRelatedWork W1991457682 @default.
• W2159133834 hasRelatedWork W2002955584 @default.
• W2159133834 hasRelatedWork W2025042331 @default.
• W2159133834 hasRelatedWork W2038173448 @default.
• W2159133834 hasRelatedWork W2105149665 @default.
• W2159133834 hasRelatedWork W2152642194 @default.
• W2159133834 hasRelatedWork W2164790506 @default.
• W2159133834 hasRelatedWork W2168192189 @default.
• W2159133834 hasRelatedWork W2333496048 @default.
• W2159133834 hasRelatedWork W2334716682 @default.
• W2159133834 hasRelatedWork W2606208883 @default.
• W2159133834 hasRelatedWork W2797708869 @default.
• W2159133834 hasRelatedWork W3169301398 @default.
• W2159133834 hasRelatedWork W3180741717 @default.
• W2159133834 isParatext "false" @default.

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