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- W2159154993 abstract "To accurately consider 2D dopant profile effect, we have studied transport modeling by comparing nMOSFETs with indium or boron pocket implant. Our inverse modeling has successfully extracted their features of dopant profiles and DIBL effects. It has enabled us to evaluate that the generalized hydrodynamic model is highly reliable even in smaller MOSFETs down to Le 20 nm." @default.
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- W2159154993 date "2003-01-01" @default.
- W2159154993 modified "2023-09-27" @default.
- W2159154993 title "Accurate Transport Modeling with 2D Dopant Profile Effect in L e ∼ 20 nm MOSFETs via Inverse Modeling" @default.
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