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• W2159331390 abstract "The numerical evaluation of intrinsic dissipation induced by thermoelastic coupling is of paramount importance in microelectromechanical systems. This paper presents a finite-element based procedure for the computation of thermoelastic dissipation in microdevices. In case of ultrathin resonators, the experiments show that damping is strongly influenced by size-dependent phenomena. In order to simulate the scale dependence of dissipation, an enhanced nonlocal coupled thermoelastic model is introduced and the first results are discussed." @default.
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• W2159331390 date "2008-04-01" @default.
• W2159331390 modified "2023-09-23" @default.
• W2159331390 title "Intrinsic dissipation in microelectromechanical systems" @default.
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• W2159331390 doi "https://doi.org/10.1109/esime.2008.4525084" @default.
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