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- W2159649218 abstract "Numerical analysis of laser chemical vapor deposition (LCVD) of titanium nitride by a moving laser beam is presented. The effect of natural convection due to temperature and concentration differences in the gaseous mixture is modeled and implemented into thermal model of LCVD by a moving laser beam. The problem is formulated in a coordinate system that moves with the laser beam and therefore, the problem is a quasi-steady state problem. The results show that the effect of natural convection on the shape of deposited film is very insignificant for cases with a laser power of 300 W but becomes important when the laser power is increased to 360 W." @default.
- W2159649218 created "2016-06-24" @default.
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- W2159649218 date "2003-05-20" @default.
- W2159649218 modified "2023-10-16" @default.
- W2159649218 title "Quasi-Steady State Natural Convection in Laser Chemical Vapor Deposition With a Moving Laser Beam" @default.
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- W2159649218 doi "https://doi.org/10.1115/1.1565088" @default.
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