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- W2159658600 abstract "Love-mode acoustic devices are very promising as biosensors in gaseous and liquid environments because of their high sensitivity. An experimental studu of Love-wave devices based on SiO2/ST-cut quartz, over a wide range of SiO2 thickness, is presented in this paper. Devices with up to 7.3 μm thick SiO2 guiding layers have been successully manufactured via an r.f. sputtering technique. Mass sensitivity, velocity, insertion loss, oscillation frequency stability and temperature coefficient of the frequency have been studied as a function of layer thickness. The sensitivity increases with increasing layer thickness and reaches a maximum at around 5.5 μm, for a wavelenght of 40 μm, in accordance with theory. Further increasing the thickness decreases the sensitivity dramatically. High sensitivity (≥ 300 cm2 g−1) can be achieved at thickness between 3.5 and 6.5 μm. The Low-wave dual-channel delay-line oscilltors also demonstrate high frequency stability and low noise levels. The frequencies of the two channels track each other extremely well." @default.
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- W2159658600 date "1996-09-01" @default.
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- W2159658600 title "A study of Love-wave acoustic sensors" @default.
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- W2159658600 doi "https://doi.org/10.1016/s0924-4247(96)01311-8" @default.
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