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- W2159969776 abstract "As critical dimensions of semiconductor devices shrink towards 10n and smaller, applications of advanced process control (APC) solutions no longer reap large reductions of observed variances as it used to behave, sometimes with bare improvements or even deteriorations, consequently raising disgruntlement of the management." @default.
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- W2159969776 title "A review of variance amplifications by advanced process control" @default.
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