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• W2159979087 endingPage "10105" @default.
• W2159979087 startingPage "10096" @default.
• W2159979087 abstract "A novel microreactor-based photomask capable of effecting high resolution, large area patterning of UV/ozone (UVO) treatments of poly(dimethylsiloxane) (PDMS) surfaces is described. This tool forms the basis of two new soft lithographic patterning techniques that significantly extend the design rules of decal transfer lithography (DTL). The first technique, photodefined cohesive mechanical failure, fuses the design rules of photolithography with the contact-based adhesive transfer of PDMS in DTL. In a second powerful variation, the UVO masks described in this work enable a masterless soft lithographic patterning process. This latter method, UVO-patterned adhesive transfer, allows the direct transfer of PDMS-based polymer microstructures from a slab of polymer to silicon and other material surfaces. Both methods exploit the improved process qualities that result from the use of a deuterium discharge lamp to affect the UVO treatment to pattern complex, large area PDMS patterns with limiting feature sizes extending well below 1 μm (≥0.3 μm). The use of these structures as resists is demonstrated for the patterning of metal thin films. A time-of-flight secondary ion mass spectroscopy study of the process provides new insights into the mechanisms that contribute to the chemistry responsible for the interfacial adhesion of DTL transfers." @default.
• W2159979087 created "2016-06-24" @default.
• W2159979087 creator A5024392988 @default.
• W2159979087 creator A5053492678 @default.
• W2159979087 creator A5055843916 @default.
• W2159979087 creator A5080432141 @default.
• W2159979087 date "2005-06-01" @default.
• W2159979087 modified "2023-10-03" @default.
• W2159979087 title "Masterless Soft Lithography: Patterning UV/Ozone−Induced Adhesion on Poly(dimethylsiloxane) Surfaces" @default.
• W2159979087 cites W1584223674 @default.
• W2159979087 cites W1966856912 @default.
• W2159979087 cites W1978147067 @default.
• W2159979087 cites W1980590573 @default.
• W2159979087 cites W1980655227 @default.
• W2159979087 cites W1984874412 @default.
• W2159979087 cites W1985225370 @default.
• W2159979087 cites W1992299334 @default.
• W2159979087 cites W2006684038 @default.
• W2159979087 cites W2015209383 @default.
• W2159979087 cites W2015664450 @default.
• W2159979087 cites W2021233497 @default.
• W2159979087 cites W2026908430 @default.
• W2159979087 cites W2034559321 @default.
• W2159979087 cites W2035684589 @default.
• W2159979087 cites W2048368134 @default.
• W2159979087 cites W2053004872 @default.
• W2159979087 cites W2053918585 @default.
• W2159979087 cites W2057454789 @default.
• W2159979087 cites W2059477977 @default.
• W2159979087 cites W2067020292 @default.
• W2159979087 cites W2078782272 @default.
• W2159979087 cites W2082812735 @default.
• W2159979087 cites W2085290741 @default.
• W2159979087 cites W2097995180 @default.
• W2159979087 cites W2137034111 @default.
• W2159979087 cites W2153620344 @default.
• W2159979087 cites W2159707281 @default.
• W2159979087 doi "https://doi.org/10.1021/la050011b" @default.
• W2159979087 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/16229532" @default.
• W2159979087 hasPublicationYear "2005" @default.
• W2159979087 type Work @default.
• W2159979087 sameAs 2159979087 @default.
• W2159979087 citedByCount "64" @default.
• W2159979087 countsByYear W21599790872012 @default.
• W2159979087 countsByYear W21599790872013 @default.
• W2159979087 countsByYear W21599790872014 @default.
• W2159979087 countsByYear W21599790872015 @default.
• W2159979087 countsByYear W21599790872016 @default.
• W2159979087 countsByYear W21599790872017 @default.
• W2159979087 countsByYear W21599790872018 @default.
• W2159979087 countsByYear W21599790872019 @default.
• W2159979087 countsByYear W21599790872020 @default.
• W2159979087 countsByYear W21599790872021 @default.
• W2159979087 countsByYear W21599790872022 @default.
• W2159979087 countsByYear W21599790872023 @default.
• W2159979087 crossrefType "journal-article" @default.
• W2159979087 hasAuthorship W2159979087A5024392988 @default.
• W2159979087 hasAuthorship W2159979087A5053492678 @default.
• W2159979087 hasAuthorship W2159979087A5055843916 @default.
• W2159979087 hasAuthorship W2159979087A5080432141 @default.
• W2159979087 hasConcept C105487726 @default.
• W2159979087 hasConcept C118524077 @default.
• W2159979087 hasConcept C136525101 @default.
• W2159979087 hasConcept C142724271 @default.
• W2159979087 hasConcept C14737013 @default.
• W2159979087 hasConcept C147831808 @default.
• W2159979087 hasConcept C159985019 @default.
• W2159979087 hasConcept C161790260 @default.
• W2159979087 hasConcept C171250308 @default.
• W2159979087 hasConcept C185592680 @default.
• W2159979087 hasConcept C192562407 @default.
• W2159979087 hasConcept C204223013 @default.
• W2159979087 hasConcept C204787440 @default.
• W2159979087 hasConcept C2779227376 @default.
• W2159979087 hasConcept C49040817 @default.
• W2159979087 hasConcept C521977710 @default.
• W2159979087 hasConcept C53524968 @default.
• W2159979087 hasConcept C55493867 @default.
• W2159979087 hasConcept C68928338 @default.
• W2159979087 hasConcept C71924100 @default.
• W2159979087 hasConcept C84416704 @default.
• W2159979087 hasConceptScore W2159979087C105487726 @default.
• W2159979087 hasConceptScore W2159979087C118524077 @default.
• W2159979087 hasConceptScore W2159979087C136525101 @default.
• W2159979087 hasConceptScore W2159979087C142724271 @default.
• W2159979087 hasConceptScore W2159979087C14737013 @default.
• W2159979087 hasConceptScore W2159979087C147831808 @default.
• W2159979087 hasConceptScore W2159979087C159985019 @default.
• W2159979087 hasConceptScore W2159979087C161790260 @default.
• W2159979087 hasConceptScore W2159979087C171250308 @default.
• W2159979087 hasConceptScore W2159979087C185592680 @default.
• W2159979087 hasConceptScore W2159979087C192562407 @default.
• W2159979087 hasConceptScore W2159979087C204223013 @default.
• W2159979087 hasConceptScore W2159979087C204787440 @default.
• W2159979087 hasConceptScore W2159979087C2779227376 @default.
• W2159979087 hasConceptScore W2159979087C49040817 @default.
• W2159979087 hasConceptScore W2159979087C521977710 @default.
• W2159979087 hasConceptScore W2159979087C53524968 @default.

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