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• W2160367663 endingPage "1053" @default.
• W2160367663 startingPage "1043" @default.
• W2160367663 abstract "Accurate measurement of material strength at small scales is of critical importance for the design and manufacture of reliable micro- and nanoscale devices. Many materials of interest, e.g., polycrystalline silicon (polysilicon) and silicon carbide, are brittle, with statistical strength distributions. Therefore, strength quantification requires a large number of tests accurately performed on a practical platform. Here, analysis and testing of a compact on-chip microtensile test system, recently presented in a brief communication [Hazra et al., Journal of Micromechanics & Microengineering, 2009], is expanded significantly. We present new data on strength, alignment precision, temperature distribution, compliance calibration, stiffness ratio, force calibration, and effect of monolayer film coverage. High force (up to 30 mN) is applied to a 70-μm-long freestanding tensile bar (nominally of 2 μm width and 2.25 μm height) by cooling a thermal actuator (TA) that has gripped a crosshead via a prehensile mechanism. According to finite element analysis, specimen heating is small (<; 45°C above ambient). The system features a relatively small area occupied on the chip (500 × 700 μm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ); excellent alignment resulting in in-plane and out-of-plane stress gradients of 2.2% and 1.5%, respectively, no sensitivity to residual stress or to cross-sectional shape, and high strain resolution (2.3 ×10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-4</sup> ). A compliance calibration factor, obtained from finite element analysis, is used to convert measured fracture displacement to fracture strain. The grip mechanism must be much stiffer than the tensile bar. A value of 6.1 is determined for this stiffness ratio. We show that the TA acts as a nonlinear spring that can be modeled to determine the applied force. Assuming a value of Young's modulus <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>E</i> = 164 GPa, we find a characteristic strength of 2.45 GPa, with a Weibull modulus of 12.04, reflecting a sample size of <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>N</i> = 34 polysilicon microtensile bars." @default.
• W2160367663 created "2016-06-24" @default.
• W2160367663 creator A5015471779 @default.
• W2160367663 creator A5017748148 @default.
• W2160367663 creator A5027855773 @default.
• W2160367663 creator A5089099206 @default.
• W2160367663 date "2011-08-01" @default.
• W2160367663 modified "2023-09-26" @default.
• W2160367663 title "Compact On-Chip Microtensile Tester With Prehensile Grip Mechanism" @default.
• W2160367663 cites W1546625087 @default.
• W2160367663 cites W1964800497 @default.
• W2160367663 cites W1966405646 @default.
• W2160367663 cites W1973745539 @default.
• W2160367663 cites W1974687098 @default.
• W2160367663 cites W1985031737 @default.
• W2160367663 cites W1990452075 @default.
• W2160367663 cites W1993096779 @default.
• W2160367663 cites W1993546792 @default.
• W2160367663 cites W1993683949 @default.
• W2160367663 cites W2001403483 @default.
• W2160367663 cites W2006193841 @default.
• W2160367663 cites W2009724607 @default.
• W2160367663 cites W2012498557 @default.
• W2160367663 cites W2018046396 @default.
• W2160367663 cites W2020076823 @default.
• W2160367663 cites W2020766587 @default.
• W2160367663 cites W2020864998 @default.
• W2160367663 cites W2021920430 @default.
• W2160367663 cites W2022168868 @default.
• W2160367663 cites W2027248520 @default.
• W2160367663 cites W2057860011 @default.
• W2160367663 cites W2062750046 @default.
• W2160367663 cites W2069945945 @default.
• W2160367663 cites W2078434031 @default.
• W2160367663 cites W2078588086 @default.
• W2160367663 cites W2081943400 @default.
• W2160367663 cites W2098475746 @default.
• W2160367663 cites W2102492562 @default.
• W2160367663 cites W2111062180 @default.
• W2160367663 cites W2111843249 @default.
• W2160367663 cites W2115054119 @default.
• W2160367663 cites W2115302362 @default.
• W2160367663 cites W2129104814 @default.
• W2160367663 cites W2148317686 @default.
• W2160367663 cites W2148471671 @default.
• W2160367663 cites W2151380664 @default.
• W2160367663 cites W2152005601 @default.
• W2160367663 cites W2161152905 @default.
• W2160367663 cites W2163083541 @default.
• W2160367663 cites W2163653975 @default.
• W2160367663 cites W4233877140 @default.
• W2160367663 cites W4233975528 @default.
• W2160367663 cites W4241153771 @default.
• W2160367663 cites W80716004 @default.
• W2160367663 doi "https://doi.org/10.1109/jmems.2011.2159097" @default.
• W2160367663 hasPublicationYear "2011" @default.
• W2160367663 type Work @default.
• W2160367663 sameAs 2160367663 @default.
• W2160367663 citedByCount "21" @default.
• W2160367663 countsByYear W21603676632012 @default.
• W2160367663 countsByYear W21603676632013 @default.
• W2160367663 countsByYear W21603676632014 @default.
• W2160367663 countsByYear W21603676632015 @default.
• W2160367663 countsByYear W21603676632016 @default.
• W2160367663 countsByYear W21603676632017 @default.
• W2160367663 countsByYear W21603676632019 @default.
• W2160367663 countsByYear W21603676632020 @default.
• W2160367663 countsByYear W21603676632021 @default.
• W2160367663 countsByYear W21603676632022 @default.
• W2160367663 crossrefType "journal-article" @default.
• W2160367663 hasAuthorship W2160367663A5015471779 @default.
• W2160367663 hasAuthorship W2160367663A5017748148 @default.
• W2160367663 hasAuthorship W2160367663A5027855773 @default.
• W2160367663 hasAuthorship W2160367663A5089099206 @default.
• W2160367663 hasConcept C112950240 @default.
• W2160367663 hasConcept C121332964 @default.
• W2160367663 hasConcept C127413603 @default.
• W2160367663 hasConcept C136478896 @default.
• W2160367663 hasConcept C159985019 @default.
• W2160367663 hasConcept C165005293 @default.
• W2160367663 hasConcept C165838908 @default.
• W2160367663 hasConcept C182508753 @default.
• W2160367663 hasConcept C192562407 @default.
• W2160367663 hasConcept C2779372316 @default.
• W2160367663 hasConcept C41008148 @default.
• W2160367663 hasConcept C62520636 @default.
• W2160367663 hasConcept C66938386 @default.
• W2160367663 hasConcept C76155785 @default.
• W2160367663 hasConceptScore W2160367663C112950240 @default.
• W2160367663 hasConceptScore W2160367663C121332964 @default.
• W2160367663 hasConceptScore W2160367663C127413603 @default.
• W2160367663 hasConceptScore W2160367663C136478896 @default.
• W2160367663 hasConceptScore W2160367663C159985019 @default.
• W2160367663 hasConceptScore W2160367663C165005293 @default.
• W2160367663 hasConceptScore W2160367663C165838908 @default.
• W2160367663 hasConceptScore W2160367663C182508753 @default.
• W2160367663 hasConceptScore W2160367663C192562407 @default.
• W2160367663 hasConceptScore W2160367663C2779372316 @default.

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