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- W2160572146 abstract "As an alternative to the visual observation method used conventionally, a new approach of sensing the displacement of suface-micromachined polysilicon actuators or microactuator arrays by the measurement of capacitance variation of the electrodes is proposed in this paper. Finite element analysis (FEA) is used to provide the relation between the lateral displacement and the capacitance. In the preliminary design, the capacitance variation is on the order of fF. In order to measure the displacement precisely, the electrode arrays are proposed. This method could be useful for testing a variety of laterally driven microactuators and arrays, including MEMDACs." @default.
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- W2160572146 date "2002-09-10" @default.
- W2160572146 modified "2023-09-23" @default.
- W2160572146 title "Laterally driven variable capacitor for displacement measurement of microactuators" @default.
- W2160572146 doi "https://doi.org/10.1117/12.483157" @default.
- W2160572146 hasPublicationYear "2002" @default.
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