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- W2160682960 abstract "This paper refers to the development of the KrF (248nm) excimer laser stepper system and related technology, both the resist and the alkaline water-soluble contrast enhancement materials, designed for use in combination with the excimer laser. A coherent-noise (speckle-free and high-speed image transmission have been successfully achieved by the high power. and narrow band width of the oscillation wavelength. The new positive resist has little absorption on the resist surface at around 248nm, which suggests high gamma value. The new water-soluble contrast-enhancement materials for the KrF excimer laser helps to attain the high contrast resolution of resist patterns. Both of these materials are very effective when used under the excimer laser system. This excimer laser lithography has been confirmed as an effective technology to fabricate 0.5 micron design rules VLSIs with hyperfine structure." @default.
- W2160682960 created "2016-06-24" @default.
- W2160682960 creator A5002187420 @default.
- W2160682960 creator A5009963820 @default.
- W2160682960 creator A5020011335 @default.
- W2160682960 creator A5069063056 @default.
- W2160682960 creator A5071127380 @default.
- W2160682960 date "1986-01-01" @default.
- W2160682960 modified "2023-09-25" @default.
- W2160682960 title "Half-micron photolithography using a KrF excimer laser stepper" @default.
- W2160682960 cites W2188838890 @default.
- W2160682960 doi "https://doi.org/10.1109/iedm.1986.191179" @default.
- W2160682960 hasPublicationYear "1986" @default.
- W2160682960 type Work @default.
- W2160682960 sameAs 2160682960 @default.
- W2160682960 citedByCount "2" @default.
- W2160682960 crossrefType "proceedings-article" @default.
- W2160682960 hasAuthorship W2160682960A5002187420 @default.
- W2160682960 hasAuthorship W2160682960A5009963820 @default.
- W2160682960 hasAuthorship W2160682960A5020011335 @default.
- W2160682960 hasAuthorship W2160682960A5069063056 @default.
- W2160682960 hasAuthorship W2160682960A5071127380 @default.
- W2160682960 hasConcept C105487726 @default.
- W2160682960 hasConcept C120665830 @default.
- W2160682960 hasConcept C121332964 @default.
- W2160682960 hasConcept C171250308 @default.
- W2160682960 hasConcept C187504802 @default.
- W2160682960 hasConcept C192562407 @default.
- W2160682960 hasConcept C204223013 @default.
- W2160682960 hasConcept C2779227376 @default.
- W2160682960 hasConcept C2780477314 @default.
- W2160682960 hasConcept C49040817 @default.
- W2160682960 hasConcept C520434653 @default.
- W2160682960 hasConcept C53524968 @default.
- W2160682960 hasConcept C74561354 @default.
- W2160682960 hasConceptScore W2160682960C105487726 @default.
- W2160682960 hasConceptScore W2160682960C120665830 @default.
- W2160682960 hasConceptScore W2160682960C121332964 @default.
- W2160682960 hasConceptScore W2160682960C171250308 @default.
- W2160682960 hasConceptScore W2160682960C187504802 @default.
- W2160682960 hasConceptScore W2160682960C192562407 @default.
- W2160682960 hasConceptScore W2160682960C204223013 @default.
- W2160682960 hasConceptScore W2160682960C2779227376 @default.
- W2160682960 hasConceptScore W2160682960C2780477314 @default.
- W2160682960 hasConceptScore W2160682960C49040817 @default.
- W2160682960 hasConceptScore W2160682960C520434653 @default.
- W2160682960 hasConceptScore W2160682960C53524968 @default.
- W2160682960 hasConceptScore W2160682960C74561354 @default.
- W2160682960 hasLocation W21606829601 @default.
- W2160682960 hasOpenAccess W2160682960 @default.
- W2160682960 hasPrimaryLocation W21606829601 @default.
- W2160682960 hasRelatedWork W1971705391 @default.
- W2160682960 hasRelatedWork W1972237080 @default.
- W2160682960 hasRelatedWork W1975152519 @default.
- W2160682960 hasRelatedWork W1980131984 @default.
- W2160682960 hasRelatedWork W1993735600 @default.
- W2160682960 hasRelatedWork W1996949467 @default.
- W2160682960 hasRelatedWork W2014212607 @default.
- W2160682960 hasRelatedWork W2014296659 @default.
- W2160682960 hasRelatedWork W2028704672 @default.
- W2160682960 hasRelatedWork W2035633072 @default.
- W2160682960 hasRelatedWork W2041142071 @default.
- W2160682960 hasRelatedWork W2059181868 @default.
- W2160682960 hasRelatedWork W2060955693 @default.
- W2160682960 hasRelatedWork W2070543786 @default.
- W2160682960 hasRelatedWork W2075543283 @default.
- W2160682960 hasRelatedWork W2078293633 @default.
- W2160682960 hasRelatedWork W2079822627 @default.
- W2160682960 hasRelatedWork W2370484637 @default.
- W2160682960 hasRelatedWork W3091884080 @default.
- W2160682960 hasRelatedWork W2083967395 @default.
- W2160682960 isParatext "false" @default.
- W2160682960 isRetracted "false" @default.
- W2160682960 magId "2160682960" @default.
- W2160682960 workType "article" @default.