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- W2160721272 abstract "A new diamond-based microelectronic gas sensor has been developed for the detection of O/sub 2/ and CO gases. The gas sensing performance and detection mechanisms of the sensor for O/sub 2/ and CO gases have been analyzed. The gas sensitivity of the sensor is high, repeatable, and reproducible. The response time is in seconds to a small concentration of O/sub 2/ and CO gases. The gas detection mechanism of the new sensor is attributed to the change in the oxygen vacancies of the SnO/sub x/ layer upon O/sub 2/ and CO exposure. The new diamond-based microelectronic gas sensor could be applied for the detection of oxidizing and reducing gases over a higher and wider temperature range than currently possible." @default.
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- W2160721272 date "2002-11-22" @default.
- W2160721272 modified "2023-09-27" @default.
- W2160721272 title "High sensitivity and temperature tolerant microelectronic O/sub 2/ gas sensor" @default.
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- W2160721272 doi "https://doi.org/10.1109/sensor.1997.635267" @default.
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