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- W2161590444 abstract "Carrier transport in heavily doped extremely thin silicon- on-insulator (ETSOI) diffusion layers with SOI thickness of less than 10 nm was thoroughly studied. We found that electron mobility ( µ <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>e</inf> ) in heavily doped ETSOI diffusion layer is totally different from µ <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>e</inf> in heavily doped bulk Si. In ETSOI diffusion layers with SOI thickness ranging from 5 nm to 10 nm µ <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>e</inf> is enhanced, compared with µ <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>e</inf> in heavily doped bulk Si. This enhancement is caused by the reduced number of ions which interact with carriers in ETSOI. On the other hand, in ETSOI with SOI thickness of less than 2 nm µ <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>e</inf> is degraded, compared with µ <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>e</inf> in heavily doped bulk Si. The degradation is primary due to the scattering induced by SOI thickness fluctuations. µ <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>e</inf> in heavily doped ETSOI with SOI thickness of less than 2 nm is further decreased as doping concentration increases, which results from the enhanced potential fluctuations by Coulomb potentials made by randomly distributed ions." @default.
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- W2161590444 date "2010-12-01" @default.
- W2161590444 modified "2023-09-27" @default.
- W2161590444 title "Anomalous electron mobility in extremely-thin SOI (ETSOI) diffusion layers with SOI thickness of less than 10 nm and high doping concentration of greater than 1×10<sup>18</sup>cm<sup>−3</sup>" @default.
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- W2161590444 doi "https://doi.org/10.1109/iedm.2010.5703288" @default.
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