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• W2161591536 abstract "The technology, simulation and basic calibration process of three component gas flow sensor, which is integrated with Low Temperature Cofired Ceramic, are presented in the paper. Geometry of the flow sensor is designed on the basis of FEM (Finite Element Method) calculations. The basic sensor parameters, such as measuring range, sensitivity, repeatability and hysteresis are described." @default.
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• W2161591536 date "2009-06-25" @default.
• W2161591536 modified "2023-09-23" @default.
• W2161591536 title "Three element gas flow sensor integrated with Low Temperature Cofired Ceramic (LTCC) module" @default.
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