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- W2161986485 abstract "A novel piezoelectric microbalance biosensor based on nano-crystalline PZT/quarts is fabricated. Sol-gel method is utilized to bond the PZT thin films on the quartz substrate as the sensing unit. The microstructure and the surface appearance of PZT thin films on quartz substrate and the influence of cancer cells detecting with the sensing unit using PZT/quartz are studied. The XRD and AFM results show that the PZT films feature (101) preferred orientation, perovskite crystal structure, smooth surface, and the crystal particle size is 20-30nm.The sensitivity of biosensor based on nano-crystalline PZT/quartz structure is improved." @default.
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- W2161986485 date "2009-01-01" @default.
- W2161986485 modified "2023-09-24" @default.
- W2161986485 title "The development of piezoelectric biosensor based on nano-crystalline PZT/quarts" @default.
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- W2161986485 doi "https://doi.org/10.1109/nems.2009.5068725" @default.
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