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- W2162030268 abstract "Excimer laser annealing has been utilized to manufacture low temperature polycrystalline silicon thin-film transistors with lightly doped drain (LDD) structures. The excimer laser annealing can effectively reduce the thermal budget of source/drain dopant activation, namely, without substrate heating. With the advantages of LDD structure, high performance device characteristics with a low off state current of high on/off current ratio of and good field-effect mobility of 268 cm2/V s, can be achieved simultaneously. © 2001 The Electrochemical Society. All rights reserved." @default.
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- W2162030268 date "2001-01-01" @default.
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- W2162030268 title "Effects of Excimer Laser Dopant Activation on Low Temperature Polysilicon Thin-Film Transistors with Lightly Doped Drains" @default.
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- W2162030268 doi "https://doi.org/10.1149/1.1405997" @default.
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