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- W2162220160 endingPage "364" @default.
- W2162220160 startingPage "350" @default.
- W2162220160 abstract "In the current times, microelectromechanical systems and nanoelectromechanical systems form a major interdisciplinary area of research involving science, engineering, and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This paper presents a review of the emerging advances in the modeling and control of these micro- and nanoscale devices and converges on the exciting research in on-chip control , with a mechatronics and controls perspective and concludes by projecting future trends." @default.
- W2162220160 created "2016-06-24" @default.
- W2162220160 creator A5025474694 @default.
- W2162220160 creator A5056942916 @default.
- W2162220160 date "2011-05-01" @default.
- W2162220160 modified "2023-09-24" @default.
- W2162220160 title "A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems" @default.
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