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- W2162250904 abstract "Ultrathin oxynitride gate dielectrics of similar thickness (∼1.3 nm) processed by an in situ steam-generated (ISSG), an ISSG with NO rapid thermal processing (RTP) treatment (ISSG-NO), and an ISSG with O 2 RTP treatment (ISSG-O 2 ) are investigated. The results demonstrate that ISSG-NO gate dielectrics exhibit superior interface properties, reduced leakage current, and improved reliability compared to other gate dielectrics. The ISSG-NO oxynitride film is an attractive candidate as the gate dielectrics in 90 nm and possibly beyond for complementary metal oxide semiconductor technologies." @default.
- W2162250904 created "2016-06-24" @default.
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- W2162250904 date "2006-02-01" @default.
- W2162250904 modified "2023-09-25" @default.
- W2162250904 title "Electrical Characterization of 13 A In Situ Steam-Generated Oxynitride Gate Dielectrics" @default.
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- W2162250904 doi "https://doi.org/10.1149/1.2154107" @default.
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