FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2162415602> ?p ?o ?g. }

• W2162415602 endingPage "7712" @default.
• W2162415602 startingPage "7708" @default.
• W2162415602 abstract "The deposition of SiOX films from low-pressure dielectric barrier discharge plasmas has been investigated using tetraethoxysilane (TEOS)/O2 as the feed gas. Films were analyzed using X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), AFM-based nanoindentation/nanowear techniques, and conductive AFM. Film deposition rates and hydrocarbon incorporation in the SiOX film decrease with addition of O2. High-quality SiOX films with extremely low surface roughness are deposited at high oxidant concertrations. Addition of oxidant to the feed gas leads to a change in the SiOX film structure from precursor-like to a dense SiOX structure. The SiOX films deposited with TEOS/O2 plasmas were found to have soft surface layers, 0.5–1.5 nm thick, which contribute to an improvement of their field emission properties. The effect of gas phase compositions on the surface properties of the conductive surface layer was discussed." @default.
• W2162415602 created "2016-06-24" @default.
• W2162415602 creator A5009719661 @default.
• W2162415602 creator A5013436464 @default.
• W2162415602 creator A5013454336 @default.
• W2162415602 creator A5039871761 @default.
• W2162415602 creator A5046294269 @default.
• W2162415602 creator A5061970875 @default.
• W2162415602 creator A5078550219 @default.
• W2162415602 creator A5090843422 @default.
• W2162415602 date "2009-06-01" @default.
• W2162415602 modified "2023-09-30" @default.
• W2162415602 title "Surface properties of silicon oxide films deposited using low-pressure dielectric barrier discharge" @default.
• W2162415602 cites W1597594609 @default.
• W2162415602 cites W1986871080 @default.
• W2162415602 cites W1999983836 @default.
• W2162415602 cites W2014175729 @default.
• W2162415602 cites W2014304949 @default.
• W2162415602 cites W2017692515 @default.
• W2162415602 cites W2034327584 @default.
• W2162415602 cites W2040200521 @default.
• W2162415602 cites W2044694272 @default.
• W2162415602 cites W2046339180 @default.
• W2162415602 cites W2047349977 @default.
• W2162415602 cites W2052447367 @default.
• W2162415602 cites W2054535076 @default.
• W2162415602 cites W2056220721 @default.
• W2162415602 cites W2057689817 @default.
• W2162415602 cites W2057717939 @default.
• W2162415602 cites W2058958512 @default.
• W2162415602 cites W2069846540 @default.
• W2162415602 cites W2074619771 @default.
• W2162415602 cites W2078684111 @default.
• W2162415602 cites W2080616827 @default.
• W2162415602 cites W2083175303 @default.
• W2162415602 cites W2094324338 @default.
• W2162415602 cites W2128169256 @default.
• W2162415602 cites W2162701325 @default.
• W2162415602 doi "https://doi.org/10.1016/j.apsusc.2009.04.142" @default.
• W2162415602 hasPublicationYear "2009" @default.
• W2162415602 type Work @default.
• W2162415602 sameAs 2162415602 @default.
• W2162415602 citedByCount "14" @default.
• W2162415602 countsByYear W21624156022013 @default.
• W2162415602 countsByYear W21624156022014 @default.
• W2162415602 countsByYear W21624156022016 @default.
• W2162415602 countsByYear W21624156022017 @default.
• W2162415602 countsByYear W21624156022020 @default.
• W2162415602 countsByYear W21624156022021 @default.
• W2162415602 crossrefType "journal-article" @default.
• W2162415602 hasAuthorship W2162415602A5009719661 @default.
• W2162415602 hasAuthorship W2162415602A5013436464 @default.
• W2162415602 hasAuthorship W2162415602A5013454336 @default.
• W2162415602 hasAuthorship W2162415602A5039871761 @default.
• W2162415602 hasAuthorship W2162415602A5046294269 @default.
• W2162415602 hasAuthorship W2162415602A5061970875 @default.
• W2162415602 hasAuthorship W2162415602A5078550219 @default.
• W2162415602 hasAuthorship W2162415602A5090843422 @default.
• W2162415602 hasConcept C107365816 @default.
• W2162415602 hasConcept C113196181 @default.
• W2162415602 hasConcept C127413603 @default.
• W2162415602 hasConcept C133386390 @default.
• W2162415602 hasConcept C151730666 @default.
• W2162415602 hasConcept C159985019 @default.
• W2162415602 hasConcept C171250308 @default.
• W2162415602 hasConcept C175708663 @default.
• W2162415602 hasConcept C178790620 @default.
• W2162415602 hasConcept C185592680 @default.
• W2162415602 hasConcept C19067145 @default.
• W2162415602 hasConcept C191897082 @default.
• W2162415602 hasConcept C192562407 @default.
• W2162415602 hasConcept C2777431650 @default.
• W2162415602 hasConcept C2779105228 @default.
• W2162415602 hasConcept C2779227376 @default.
• W2162415602 hasConcept C2779851234 @default.
• W2162415602 hasConcept C2816523 @default.
• W2162415602 hasConcept C42360764 @default.
• W2162415602 hasConcept C49040817 @default.
• W2162415602 hasConcept C49326732 @default.
• W2162415602 hasConcept C544956773 @default.
• W2162415602 hasConcept C64297162 @default.
• W2162415602 hasConcept C86803240 @default.
• W2162415602 hasConcept C89448510 @default.
• W2162415602 hasConceptScore W2162415602C107365816 @default.
• W2162415602 hasConceptScore W2162415602C113196181 @default.
• W2162415602 hasConceptScore W2162415602C127413603 @default.
• W2162415602 hasConceptScore W2162415602C133386390 @default.
• W2162415602 hasConceptScore W2162415602C151730666 @default.
• W2162415602 hasConceptScore W2162415602C159985019 @default.
• W2162415602 hasConceptScore W2162415602C171250308 @default.
• W2162415602 hasConceptScore W2162415602C175708663 @default.
• W2162415602 hasConceptScore W2162415602C178790620 @default.
• W2162415602 hasConceptScore W2162415602C185592680 @default.
• W2162415602 hasConceptScore W2162415602C19067145 @default.
• W2162415602 hasConceptScore W2162415602C191897082 @default.
• W2162415602 hasConceptScore W2162415602C192562407 @default.
• W2162415602 hasConceptScore W2162415602C2777431650 @default.
• W2162415602 hasConceptScore W2162415602C2779105228 @default.

• next