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- W2162716276 abstract "The paper describes the design and fabrication of a micro-electro-mechanical systems (MEMS) deformable mirror made by a compliant organic thin film. The residual stress and Young's modulus of a polymer film are measured and discussed. The deformation as large as 41 mum is achieved by electrostatic force with 170 V applied" @default.
- W2162716276 created "2016-06-24" @default.
- W2162716276 creator A5008689746 @default.
- W2162716276 creator A5020374738 @default.
- W2162716276 creator A5062829016 @default.
- W2162716276 date "2006-01-01" @default.
- W2162716276 modified "2023-09-26" @default.
- W2162716276 title "Large Displacement Deformable Mirrors Made by Low Stress Polyimide Membrane" @default.
- W2162716276 cites W2021552179 @default.
- W2162716276 cites W2042878923 @default.
- W2162716276 cites W2044181082 @default.
- W2162716276 cites W2046906725 @default.
- W2162716276 cites W2074445356 @default.
- W2162716276 cites W2110212728 @default.
- W2162716276 cites W2139605740 @default.
- W2162716276 cites W2158886214 @default.
- W2162716276 cites W2170293333 @default.
- W2162716276 doi "https://doi.org/10.1109/omems.2006.1708292" @default.
- W2162716276 hasPublicationYear "2006" @default.
- W2162716276 type Work @default.
- W2162716276 sameAs 2162716276 @default.
- W2162716276 citedByCount "2" @default.
- W2162716276 countsByYear W21627162762012 @default.
- W2162716276 crossrefType "proceedings-article" @default.
- W2162716276 hasAuthorship W2162716276A5008689746 @default.
- W2162716276 hasAuthorship W2162716276A5020374738 @default.
- W2162716276 hasAuthorship W2162716276A5062829016 @default.
- W2162716276 hasConcept C107551265 @default.
- W2162716276 hasConcept C120665830 @default.
- W2162716276 hasConcept C121332964 @default.
- W2162716276 hasConcept C132771110 @default.
- W2162716276 hasConcept C136525101 @default.
- W2162716276 hasConcept C136872047 @default.
- W2162716276 hasConcept C138885662 @default.
- W2162716276 hasConcept C142724271 @default.
- W2162716276 hasConcept C15744967 @default.
- W2162716276 hasConcept C159985019 @default.
- W2162716276 hasConcept C192562407 @default.
- W2162716276 hasConcept C193867417 @default.
- W2162716276 hasConcept C204366326 @default.
- W2162716276 hasConcept C204787440 @default.
- W2162716276 hasConcept C21036866 @default.
- W2162716276 hasConcept C2779227376 @default.
- W2162716276 hasConcept C2780965675 @default.
- W2162716276 hasConcept C37292000 @default.
- W2162716276 hasConcept C37977207 @default.
- W2162716276 hasConcept C41625074 @default.
- W2162716276 hasConcept C41895202 @default.
- W2162716276 hasConcept C49040817 @default.
- W2162716276 hasConcept C521977710 @default.
- W2162716276 hasConcept C542102704 @default.
- W2162716276 hasConcept C54355233 @default.
- W2162716276 hasConcept C71924100 @default.
- W2162716276 hasConcept C86803240 @default.
- W2162716276 hasConceptScore W2162716276C107551265 @default.
- W2162716276 hasConceptScore W2162716276C120665830 @default.
- W2162716276 hasConceptScore W2162716276C121332964 @default.
- W2162716276 hasConceptScore W2162716276C132771110 @default.
- W2162716276 hasConceptScore W2162716276C136525101 @default.
- W2162716276 hasConceptScore W2162716276C136872047 @default.
- W2162716276 hasConceptScore W2162716276C138885662 @default.
- W2162716276 hasConceptScore W2162716276C142724271 @default.
- W2162716276 hasConceptScore W2162716276C15744967 @default.
- W2162716276 hasConceptScore W2162716276C159985019 @default.
- W2162716276 hasConceptScore W2162716276C192562407 @default.
- W2162716276 hasConceptScore W2162716276C193867417 @default.
- W2162716276 hasConceptScore W2162716276C204366326 @default.
- W2162716276 hasConceptScore W2162716276C204787440 @default.
- W2162716276 hasConceptScore W2162716276C21036866 @default.
- W2162716276 hasConceptScore W2162716276C2779227376 @default.
- W2162716276 hasConceptScore W2162716276C2780965675 @default.
- W2162716276 hasConceptScore W2162716276C37292000 @default.
- W2162716276 hasConceptScore W2162716276C37977207 @default.
- W2162716276 hasConceptScore W2162716276C41625074 @default.
- W2162716276 hasConceptScore W2162716276C41895202 @default.
- W2162716276 hasConceptScore W2162716276C49040817 @default.
- W2162716276 hasConceptScore W2162716276C521977710 @default.
- W2162716276 hasConceptScore W2162716276C542102704 @default.
- W2162716276 hasConceptScore W2162716276C54355233 @default.
- W2162716276 hasConceptScore W2162716276C71924100 @default.
- W2162716276 hasConceptScore W2162716276C86803240 @default.
- W2162716276 hasLocation W21627162761 @default.
- W2162716276 hasOpenAccess W2162716276 @default.
- W2162716276 hasPrimaryLocation W21627162761 @default.
- W2162716276 hasRelatedWork W1977005473 @default.
- W2162716276 hasRelatedWork W1996047374 @default.
- W2162716276 hasRelatedWork W2015399881 @default.
- W2162716276 hasRelatedWork W2051270029 @default.
- W2162716276 hasRelatedWork W2073784383 @default.
- W2162716276 hasRelatedWork W2327874218 @default.
- W2162716276 hasRelatedWork W2970009918 @default.
- W2162716276 hasRelatedWork W2991685631 @default.
- W2162716276 hasRelatedWork W3005130480 @default.
- W2162716276 hasRelatedWork W3008667745 @default.
- W2162716276 isParatext "false" @default.
- W2162716276 isRetracted "false" @default.
- W2162716276 magId "2162716276" @default.
- W2162716276 workType "article" @default.