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• W2162930691 endingPage "398" @default.
• W2162930691 startingPage "390" @default.
• W2162930691 abstract "New methodologies in anisotropic wet-chemical etching of <111>-oriented silicon, allowing useful process designs combined with smart mask-to-crystal-orientation-alignment are presented in this paper. The described methods yield smooth surfaces as well as high-quality plan-parallel beams and membranes. With a combination of pre-etching and wall passivation, structures can be etched at different depths in a wafer. Designs, using the <111>-crystal orientation, supplemented with pictures of fabricated devices, demonstrate the potential of using <111>-oriented wafers in microsystem design." @default.
• W2162930691 created "2016-06-24" @default.
• W2162930691 creator A5006275680 @default.
• W2162930691 creator A5012791912 @default.
• W2162930691 creator A5033618685 @default.
• W2162930691 creator A5037228905 @default.
• W2162930691 creator A5039709252 @default.
• W2162930691 creator A5048744004 @default.
• W2162930691 creator A5076338438 @default.
• W2162930691 date "2000-09-01" @default.
• W2162930691 modified "2023-10-01" @default.
• W2162930691 title "Etching methodologies in <111>-oriented silicon wafers" @default.
• W2162930691 cites W1585762288 @default.
• W2162930691 cites W1670172520 @default.
• W2162930691 cites W1932951818 @default.
• W2162930691 cites W1970509195 @default.
• W2162930691 cites W1971710470 @default.
• W2162930691 cites W1990632716 @default.
• W2162930691 cites W2013591683 @default.
• W2162930691 cites W2019023417 @default.
• W2162930691 cites W2050746330 @default.
• W2162930691 cites W2059862724 @default.
• W2162930691 cites W2059967747 @default.
• W2162930691 cites W2079126691 @default.
• W2162930691 cites W2112535567 @default.
• W2162930691 cites W2116028359 @default.
• W2162930691 cites W2136086005 @default.
• W2162930691 cites W2137178805 @default.
• W2162930691 cites W2137983525 @default.
• W2162930691 cites W2147142329 @default.
• W2162930691 cites W2147543022 @default.
• W2162930691 doi "https://doi.org/10.1109/84.870065" @default.
• W2162930691 hasPublicationYear "2000" @default.
• W2162930691 type Work @default.
• W2162930691 sameAs 2162930691 @default.
• W2162930691 citedByCount "67" @default.
• W2162930691 countsByYear W21629306912012 @default.
• W2162930691 countsByYear W21629306912013 @default.
• W2162930691 countsByYear W21629306912014 @default.
• W2162930691 countsByYear W21629306912015 @default.
• W2162930691 countsByYear W21629306912017 @default.
• W2162930691 countsByYear W21629306912018 @default.
• W2162930691 countsByYear W21629306912019 @default.
• W2162930691 countsByYear W21629306912020 @default.
• W2162930691 countsByYear W21629306912021 @default.
• W2162930691 countsByYear W21629306912022 @default.
• W2162930691 countsByYear W21629306912023 @default.
• W2162930691 crossrefType "journal-article" @default.
• W2162930691 hasAuthorship W2162930691A5006275680 @default.
• W2162930691 hasAuthorship W2162930691A5012791912 @default.
• W2162930691 hasAuthorship W2162930691A5033618685 @default.
• W2162930691 hasAuthorship W2162930691A5037228905 @default.
• W2162930691 hasAuthorship W2162930691A5039709252 @default.
• W2162930691 hasAuthorship W2162930691A5048744004 @default.
• W2162930691 hasAuthorship W2162930691A5076338438 @default.
• W2162930691 hasConcept C100460472 @default.
• W2162930691 hasConcept C134121241 @default.
• W2162930691 hasConcept C151054161 @default.
• W2162930691 hasConcept C159985019 @default.
• W2162930691 hasConcept C160671074 @default.
• W2162930691 hasConcept C16345878 @default.
• W2162930691 hasConcept C171250308 @default.
• W2162930691 hasConcept C192562407 @default.
• W2162930691 hasConcept C199360897 @default.
• W2162930691 hasConcept C2524010 @default.
• W2162930691 hasConcept C2779227376 @default.
• W2162930691 hasConcept C2781285689 @default.
• W2162930691 hasConcept C33220542 @default.
• W2162930691 hasConcept C33574316 @default.
• W2162930691 hasConcept C33923547 @default.
• W2162930691 hasConcept C41008148 @default.
• W2162930691 hasConcept C49040817 @default.
• W2162930691 hasConcept C544956773 @default.
• W2162930691 hasConceptScore W2162930691C100460472 @default.
• W2162930691 hasConceptScore W2162930691C134121241 @default.
• W2162930691 hasConceptScore W2162930691C151054161 @default.
• W2162930691 hasConceptScore W2162930691C159985019 @default.
• W2162930691 hasConceptScore W2162930691C160671074 @default.
• W2162930691 hasConceptScore W2162930691C16345878 @default.
• W2162930691 hasConceptScore W2162930691C171250308 @default.
• W2162930691 hasConceptScore W2162930691C192562407 @default.
• W2162930691 hasConceptScore W2162930691C199360897 @default.
• W2162930691 hasConceptScore W2162930691C2524010 @default.
• W2162930691 hasConceptScore W2162930691C2779227376 @default.
• W2162930691 hasConceptScore W2162930691C2781285689 @default.
• W2162930691 hasConceptScore W2162930691C33220542 @default.
• W2162930691 hasConceptScore W2162930691C33574316 @default.
• W2162930691 hasConceptScore W2162930691C33923547 @default.
• W2162930691 hasConceptScore W2162930691C41008148 @default.
• W2162930691 hasConceptScore W2162930691C49040817 @default.
• W2162930691 hasConceptScore W2162930691C544956773 @default.
• W2162930691 hasIssue "3" @default.
• W2162930691 hasLocation W21629306911 @default.
• W2162930691 hasOpenAccess W2162930691 @default.
• W2162930691 hasPrimaryLocation W21629306911 @default.
• W2162930691 hasRelatedWork W1497161545 @default.
• W2162930691 hasRelatedWork W1980475310 @default.
• W2162930691 hasRelatedWork W1984180903 @default.

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