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• W2163157658 abstract "We report on the use of electrochemical impedance (EI) as the basis for force transduction in Parylene-based microdevices. Electrolyte-filled microstructures were realized for extremely sensitive contact-force detection (10 mN range, ±0.023 mN resolution) enabled by EI-based transduction and are a promising platform for next-generation biomedical sensing technology. The design, fabrication, and characterization of Parylene-based electrochemical-MEMS (EC-MEMS) devices capable of microNewton contact-mode force measurement are presented and discussed." @default.
• W2163157658 created "2016-06-24" @default.
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• W2163157658 date "2011-10-01" @default.
• W2163157658 modified "2023-10-16" @default.
• W2163157658 title "Impedance-Based Force Transduction Within Fluid-Filled Parylene Microstructures" @default.
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• W2163157658 doi "https://doi.org/10.1109/jmems.2011.2160935" @default.
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