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• W2163167606 abstract "We have been developing a high repetition (5 kHz) and high power (5 kW) Nd:YAG laser system for EUV lithography. Key subjects are (1) reliable front-end, (2) uniform and high density pumping of main amplifier rods, and (3) compensation of thermal effects. Fairly good uniformity was achieved by adjusting pumping geometry. Detail system analysis suggests that 8 amplifier modules pumped at 24.0 kW power are required to get output of 5 kW under relatively small thermal effects." @default.
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• W2163167606 date "2006-01-25" @default.
• W2163167606 modified "2023-09-27" @default.
• W2163167606 title "High power and high repetition Nd:YAG laser pumped by cw LDs" @default.
• W2163167606 doi "https://doi.org/10.1109/cleoe.2005.1567863" @default.
• W2163167606 hasPublicationYear "2006" @default.
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