Matches in SemOpenAlex for { <https://semopenalex.org/work/W2163594266> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2163594266 endingPage "2476" @default.
- W2163594266 startingPage "2473" @default.
- W2163594266 abstract "Profilometry of high-aspect-ratio, submicron lithographic features with a scanning force microscope is possible if the instrument satisfies several requirements. The probe must be slender enough to reach into narrow holes without sacrificing stability. The force sensor must follow the surface without damaging the sample or the probe. Finally, a position monitor must measure the location of the probe. With such an instrument, high-resolution depth measurements are straightforward. Width measurements are more difficult because of the mixing of the probe shape with sidewalls, but this problem can be overcome through careful control of the probe shape. Measurements of high-aspect ratio features with a characteristic size less than 0.5 μm will be shown, and some of the distortions caused by the probe–sample interaction will be discussed." @default.
- W2163594266 created "2016-06-24" @default.
- W2163594266 creator A5077945893 @default.
- W2163594266 date "1993-11-01" @default.
- W2163594266 modified "2023-09-25" @default.
- W2163594266 title "Line profile measurement with a scanning probe microscope" @default.
- W2163594266 doi "https://doi.org/10.1116/1.586649" @default.
- W2163594266 hasPublicationYear "1993" @default.
- W2163594266 type Work @default.
- W2163594266 sameAs 2163594266 @default.
- W2163594266 citedByCount "9" @default.
- W2163594266 crossrefType "journal-article" @default.
- W2163594266 hasAuthorship W2163594266A5077945893 @default.
- W2163594266 hasConcept C10138342 @default.
- W2163594266 hasConcept C102951782 @default.
- W2163594266 hasConcept C120665830 @default.
- W2163594266 hasConcept C121332964 @default.
- W2163594266 hasConcept C138268822 @default.
- W2163594266 hasConcept C148402106 @default.
- W2163594266 hasConcept C154945302 @default.
- W2163594266 hasConcept C159985019 @default.
- W2163594266 hasConcept C162324750 @default.
- W2163594266 hasConcept C171250308 @default.
- W2163594266 hasConcept C192562407 @default.
- W2163594266 hasConcept C198082294 @default.
- W2163594266 hasConcept C198531522 @default.
- W2163594266 hasConcept C204223013 @default.
- W2163594266 hasConcept C2780009758 @default.
- W2163594266 hasConcept C36628996 @default.
- W2163594266 hasConcept C41008148 @default.
- W2163594266 hasConcept C49040817 @default.
- W2163594266 hasConcept C67649825 @default.
- W2163594266 hasConcept C71039073 @default.
- W2163594266 hasConcept C77088390 @default.
- W2163594266 hasConcept C79261456 @default.
- W2163594266 hasConcept C82558694 @default.
- W2163594266 hasConcept C97355855 @default.
- W2163594266 hasConceptScore W2163594266C10138342 @default.
- W2163594266 hasConceptScore W2163594266C102951782 @default.
- W2163594266 hasConceptScore W2163594266C120665830 @default.
- W2163594266 hasConceptScore W2163594266C121332964 @default.
- W2163594266 hasConceptScore W2163594266C138268822 @default.
- W2163594266 hasConceptScore W2163594266C148402106 @default.
- W2163594266 hasConceptScore W2163594266C154945302 @default.
- W2163594266 hasConceptScore W2163594266C159985019 @default.
- W2163594266 hasConceptScore W2163594266C162324750 @default.
- W2163594266 hasConceptScore W2163594266C171250308 @default.
- W2163594266 hasConceptScore W2163594266C192562407 @default.
- W2163594266 hasConceptScore W2163594266C198082294 @default.
- W2163594266 hasConceptScore W2163594266C198531522 @default.
- W2163594266 hasConceptScore W2163594266C204223013 @default.
- W2163594266 hasConceptScore W2163594266C2780009758 @default.
- W2163594266 hasConceptScore W2163594266C36628996 @default.
- W2163594266 hasConceptScore W2163594266C41008148 @default.
- W2163594266 hasConceptScore W2163594266C49040817 @default.
- W2163594266 hasConceptScore W2163594266C67649825 @default.
- W2163594266 hasConceptScore W2163594266C71039073 @default.
- W2163594266 hasConceptScore W2163594266C77088390 @default.
- W2163594266 hasConceptScore W2163594266C79261456 @default.
- W2163594266 hasConceptScore W2163594266C82558694 @default.
- W2163594266 hasConceptScore W2163594266C97355855 @default.
- W2163594266 hasIssue "6" @default.
- W2163594266 hasLocation W21635942661 @default.
- W2163594266 hasOpenAccess W2163594266 @default.
- W2163594266 hasPrimaryLocation W21635942661 @default.
- W2163594266 hasRelatedWork W1417944953 @default.
- W2163594266 hasRelatedWork W1914683782 @default.
- W2163594266 hasRelatedWork W1983925733 @default.
- W2163594266 hasRelatedWork W1985534841 @default.
- W2163594266 hasRelatedWork W1989546572 @default.
- W2163594266 hasRelatedWork W1992035105 @default.
- W2163594266 hasRelatedWork W2022331525 @default.
- W2163594266 hasRelatedWork W2038886864 @default.
- W2163594266 hasRelatedWork W2080777157 @default.
- W2163594266 hasRelatedWork W2604201587 @default.
- W2163594266 hasVolume "11" @default.
- W2163594266 isParatext "false" @default.
- W2163594266 isRetracted "false" @default.
- W2163594266 magId "2163594266" @default.
- W2163594266 workType "article" @default.