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- W2163666061 abstract "Electromigration phenomena in aluminum thin film conductors subjected to high current densities are studied. The conductors are tested under superimposed dc and noise powering at temperatures of 195 and 235°C and dc density of ≈ 1.4 × 106 A/cm2. The frequency range of the noise signal with the Gaussian distribution of amplitudes is 5 Hz to 20 kHz. The results indicate that due to the superimposed dc and noise powering the electromigration failure process is accelerated and the mean lifetime of conductors is decreased by about 22 to 38 times in comparison to the corresponding dc loading. The observed effect is partly ascribed to the fluctuations of the current and, consequently, also of the temperature in the conductors. Further, it is shown that due to the noiseproduced random driving force the electromigration transport along interfaces in the polycrystalline films can be enhanced remarkably. Both these phenomena are considered to occur within the samples investigated. Es werden Elektromigrationseffekte in dünnschichtigen Aluminiumleitbahnen untersucht, die mit hohen Stromdichten belastet werden. Die Leitbahnen werden bei superponierter Gleichstrom- und Rausch-Belastung bei Temperaturen von 195 und 235°C getestet. Die Dichte des Gleichstromes beträgt ≈ 1.4 × 106 A/cm2, der Frequenzbereich des Rauschsignals mit Gauß-Verteilung für die Amplituden 5 Hz bis 20 kHz. Die Ergebnisse zeigen, daß der Ausfall der Leitbahnen durch Elektromigrationsprozesse infolge der Superposition des Gleichstromes und des Rauschens beschleunigt wird und die mittlere Lebensdauer der Leitbahnen ungefähr (22 bis 38)-mal im Verhältnis zu der entsprechenden alleinigen Gleichstrombelastung erniedrigt wird. Der beobachtete Effekt wird teilweise den Stromschwankungen – und den entsprechenden Temperaturschwankungen in den Leitbahnen – zugeschrieben. Es wird weiter gezeigt, daß infolge der rauschbedingten statistischen Triebkraft der Elektromigrationstransport entlang der Grenzflächen in polykristallinen Schichten wesentlich ansteigen kann. Beide Phänomene treten voraussichtlich bei den untersuchten Proben auf." @default.
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- W2163666061 date "1980-08-16" @default.
- W2163666061 modified "2023-10-17" @default.
- W2163666061 title "Electromigration behaviour and the lifetime of aluminum thin film conductors under superimposed dc and noise powers" @default.
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- W2163666061 doi "https://doi.org/10.1002/pssa.2210600225" @default.
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