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- W2163962506 abstract "This paper describes the results of a multi-fabricator site team in minimizing recipe diversity; the metrics used to measure the progress of the team are also defined. By identifying and measuring the differences in recipe and process locations within a route, process changes were implemented to make the process operations more standard between various fabricators and the technologies at a given fabricator. This work has resulted in eliminating unnecessary cleans, minimizing differences between various technologies, eliminating chemistries used for only a few recipes, and propagating the best practices among the fabricators." @default.
- W2163962506 created "2016-06-24" @default.
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- W2163962506 date "2003-01-20" @default.
- W2163962506 modified "2023-09-27" @default.
- W2163962506 title "Managing the negative impact of recipe diversity on wet process tools and capacity: a multi-fabricator model" @default.
- W2163962506 doi "https://doi.org/10.1109/asmc.1999.798214" @default.
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