Matches in SemOpenAlex for { <https://semopenalex.org/work/W2164240866> ?p ?o ?g. }
- W2164240866 endingPage "1911" @default.
- W2164240866 startingPage "1904" @default.
- W2164240866 abstract "Energy distributions of nitrogen atoms (N) in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 A, well separated from molecular nitrogen emission bands, was identified. Jansson's nonlinear spectral deconvolution method, refined by minimization of chi(2)(w), was used to obtain the optimal deconvolved spectra. These showed nitrogen atom energies from 1 eV to beyond 500 eV. Based on comparisons with VFTRIM computer code results, it is proposed that the energetic N's are generated from N+2 ions after these ions are accelerated through the sheath and dissociatively reflect from the cathode." @default.
- W2164240866 created "2016-06-24" @default.
- W2164240866 creator A5012391877 @default.
- W2164240866 creator A5012708804 @default.
- W2164240866 creator A5029248580 @default.
- W2164240866 creator A5091669385 @default.
- W2164240866 date "2000-02-01" @default.
- W2164240866 modified "2023-09-23" @default.
- W2164240866 title "Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron" @default.
- W2164240866 cites W1971021170 @default.
- W2164240866 cites W1981314987 @default.
- W2164240866 cites W1997055177 @default.
- W2164240866 cites W2022517492 @default.
- W2164240866 cites W2030005295 @default.
- W2164240866 cites W2030962441 @default.
- W2164240866 cites W2033178176 @default.
- W2164240866 cites W2042486368 @default.
- W2164240866 cites W2048042532 @default.
- W2164240866 cites W2058290885 @default.
- W2164240866 cites W2061287277 @default.
- W2164240866 cites W2080487735 @default.
- W2164240866 cites W2162536764 @default.
- W2164240866 doi "https://doi.org/10.1103/physreve.61.1904" @default.
- W2164240866 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/11046476" @default.
- W2164240866 hasPublicationYear "2000" @default.
- W2164240866 type Work @default.
- W2164240866 sameAs 2164240866 @default.
- W2164240866 citedByCount "16" @default.
- W2164240866 countsByYear W21642408662012 @default.
- W2164240866 countsByYear W21642408662014 @default.
- W2164240866 countsByYear W21642408662015 @default.
- W2164240866 countsByYear W21642408662016 @default.
- W2164240866 crossrefType "journal-article" @default.
- W2164240866 hasAuthorship W2164240866A5012391877 @default.
- W2164240866 hasAuthorship W2164240866A5012708804 @default.
- W2164240866 hasAuthorship W2164240866A5029248580 @default.
- W2164240866 hasAuthorship W2164240866A5091669385 @default.
- W2164240866 hasBestOaLocation W21642408662 @default.
- W2164240866 hasConcept C121332964 @default.
- W2164240866 hasConcept C121684516 @default.
- W2164240866 hasConcept C123408415 @default.
- W2164240866 hasConcept C1276947 @default.
- W2164240866 hasConcept C134786449 @default.
- W2164240866 hasConcept C145148216 @default.
- W2164240866 hasConcept C147789679 @default.
- W2164240866 hasConcept C149635348 @default.
- W2164240866 hasConcept C171250308 @default.
- W2164240866 hasConcept C184779094 @default.
- W2164240866 hasConcept C185592680 @default.
- W2164240866 hasConcept C19067145 @default.
- W2164240866 hasConcept C192562407 @default.
- W2164240866 hasConcept C22423302 @default.
- W2164240866 hasConcept C32891209 @default.
- W2164240866 hasConcept C41008148 @default.
- W2164240866 hasConcept C4839761 @default.
- W2164240866 hasConcept C49110097 @default.
- W2164240866 hasConcept C537208039 @default.
- W2164240866 hasConcept C58312451 @default.
- W2164240866 hasConcept C61427134 @default.
- W2164240866 hasConcept C62520636 @default.
- W2164240866 hasConcept C96141758 @default.
- W2164240866 hasConceptScore W2164240866C121332964 @default.
- W2164240866 hasConceptScore W2164240866C121684516 @default.
- W2164240866 hasConceptScore W2164240866C123408415 @default.
- W2164240866 hasConceptScore W2164240866C1276947 @default.
- W2164240866 hasConceptScore W2164240866C134786449 @default.
- W2164240866 hasConceptScore W2164240866C145148216 @default.
- W2164240866 hasConceptScore W2164240866C147789679 @default.
- W2164240866 hasConceptScore W2164240866C149635348 @default.
- W2164240866 hasConceptScore W2164240866C171250308 @default.
- W2164240866 hasConceptScore W2164240866C184779094 @default.
- W2164240866 hasConceptScore W2164240866C185592680 @default.
- W2164240866 hasConceptScore W2164240866C19067145 @default.
- W2164240866 hasConceptScore W2164240866C192562407 @default.
- W2164240866 hasConceptScore W2164240866C22423302 @default.
- W2164240866 hasConceptScore W2164240866C32891209 @default.
- W2164240866 hasConceptScore W2164240866C41008148 @default.
- W2164240866 hasConceptScore W2164240866C4839761 @default.
- W2164240866 hasConceptScore W2164240866C49110097 @default.
- W2164240866 hasConceptScore W2164240866C537208039 @default.
- W2164240866 hasConceptScore W2164240866C58312451 @default.
- W2164240866 hasConceptScore W2164240866C61427134 @default.
- W2164240866 hasConceptScore W2164240866C62520636 @default.
- W2164240866 hasConceptScore W2164240866C96141758 @default.
- W2164240866 hasIssue "2" @default.
- W2164240866 hasLocation W21642408661 @default.
- W2164240866 hasLocation W21642408662 @default.
- W2164240866 hasLocation W21642408663 @default.
- W2164240866 hasOpenAccess W2164240866 @default.
- W2164240866 hasPrimaryLocation W21642408661 @default.
- W2164240866 hasRelatedWork W1917749317 @default.
- W2164240866 hasRelatedWork W1922253516 @default.
- W2164240866 hasRelatedWork W2015374918 @default.
- W2164240866 hasRelatedWork W2027150331 @default.
- W2164240866 hasRelatedWork W2063240841 @default.
- W2164240866 hasRelatedWork W2069547836 @default.
- W2164240866 hasRelatedWork W2070813963 @default.
- W2164240866 hasRelatedWork W2802262998 @default.