Matches in SemOpenAlex for { <https://semopenalex.org/work/W2164254440> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2164254440 abstract "Modern semiconductor processes have increasing complexity and thus an extremely high number of degrees of freedom. During the development of such a process a large number of test structures are necessary to understand the interaction of process parameters. In this paper we present a new method to streamline the information flow from development to layout and test." @default.
- W2164254440 created "2016-06-24" @default.
- W2164254440 creator A5025990012 @default.
- W2164254440 creator A5060130885 @default.
- W2164254440 creator A5063934910 @default.
- W2164254440 creator A5088181319 @default.
- W2164254440 date "2004-09-07" @default.
- W2164254440 modified "2023-09-25" @default.
- W2164254440 title "A novel system for fully automated creation of layout, documentation and test programs for electrical test structures" @default.
- W2164254440 doi "https://doi.org/10.1109/asmc.2004.1309566" @default.
- W2164254440 hasPublicationYear "2004" @default.
- W2164254440 type Work @default.
- W2164254440 sameAs 2164254440 @default.
- W2164254440 citedByCount "3" @default.
- W2164254440 crossrefType "proceedings-article" @default.
- W2164254440 hasAuthorship W2164254440A5025990012 @default.
- W2164254440 hasAuthorship W2164254440A5060130885 @default.
- W2164254440 hasAuthorship W2164254440A5063934910 @default.
- W2164254440 hasAuthorship W2164254440A5088181319 @default.
- W2164254440 hasConcept C119857082 @default.
- W2164254440 hasConcept C127413603 @default.
- W2164254440 hasConcept C128942645 @default.
- W2164254440 hasConcept C151730666 @default.
- W2164254440 hasConcept C152877465 @default.
- W2164254440 hasConcept C199360897 @default.
- W2164254440 hasConcept C200601418 @default.
- W2164254440 hasConcept C2777267654 @default.
- W2164254440 hasConcept C41008148 @default.
- W2164254440 hasConcept C56666940 @default.
- W2164254440 hasConcept C86803240 @default.
- W2164254440 hasConcept C98045186 @default.
- W2164254440 hasConceptScore W2164254440C119857082 @default.
- W2164254440 hasConceptScore W2164254440C127413603 @default.
- W2164254440 hasConceptScore W2164254440C128942645 @default.
- W2164254440 hasConceptScore W2164254440C151730666 @default.
- W2164254440 hasConceptScore W2164254440C152877465 @default.
- W2164254440 hasConceptScore W2164254440C199360897 @default.
- W2164254440 hasConceptScore W2164254440C200601418 @default.
- W2164254440 hasConceptScore W2164254440C2777267654 @default.
- W2164254440 hasConceptScore W2164254440C41008148 @default.
- W2164254440 hasConceptScore W2164254440C56666940 @default.
- W2164254440 hasConceptScore W2164254440C86803240 @default.
- W2164254440 hasConceptScore W2164254440C98045186 @default.
- W2164254440 hasLocation W21642544401 @default.
- W2164254440 hasOpenAccess W2164254440 @default.
- W2164254440 hasPrimaryLocation W21642544401 @default.
- W2164254440 hasRelatedWork W1964879104 @default.
- W2164254440 hasRelatedWork W1970351835 @default.
- W2164254440 hasRelatedWork W1978732889 @default.
- W2164254440 hasRelatedWork W2026147481 @default.
- W2164254440 hasRelatedWork W2044744624 @default.
- W2164254440 hasRelatedWork W2068405938 @default.
- W2164254440 hasRelatedWork W2123069370 @default.
- W2164254440 hasRelatedWork W2136608291 @default.
- W2164254440 hasRelatedWork W2136662532 @default.
- W2164254440 hasRelatedWork W2543356764 @default.
- W2164254440 hasRelatedWork W2904235001 @default.
- W2164254440 hasRelatedWork W2103220020 @default.
- W2164254440 hasRelatedWork W2274854692 @default.
- W2164254440 hasRelatedWork W2293635736 @default.
- W2164254440 hasRelatedWork W2398248656 @default.
- W2164254440 hasRelatedWork W2418899200 @default.
- W2164254440 hasRelatedWork W2813738181 @default.
- W2164254440 hasRelatedWork W2817220520 @default.
- W2164254440 hasRelatedWork W3098285245 @default.
- W2164254440 hasRelatedWork W3100194813 @default.
- W2164254440 isParatext "false" @default.
- W2164254440 isRetracted "false" @default.
- W2164254440 magId "2164254440" @default.
- W2164254440 workType "article" @default.