Matches in SemOpenAlex for { <https://semopenalex.org/work/W2164335666> ?p ?o ?g. }
- W2164335666 endingPage "195212" @default.
- W2164335666 startingPage "195212" @default.
- W2164335666 abstract "Electron dynamics in a strongly asymmetric capacitively coupled radio-frequency (RF) discharge at low pressures is investigated by a combination of various diagnostics, analytical models and simulations. Electric fields in the sheath are measured phase and space resolved using fluorescence dip spectroscopy in krypton. The results are compared with a fluid sheath model. Experimentally obtained input parameters are used for the model. The excitation caused by beam-like highly energetic electrons is measured by phase resolved optical emission spectroscopy (PROES) and compared with the results of a hybrid Monte Carlo model based on the electric field resulting from the sheath model. The plasma itself is characterized by Langmuir probe measurements in terms of electron density, electron mean energy and electron energy distribution function (EEDF). The RF voltage and the current to the chamber wall are measured in parallel. At low pressures the plasma series resonance (PSR) effect is observed. It leads to high frequency oscillations of the current (non-sinusoidal RF current waveforms) and, consequently, to a faster sheath expansion. The measured current is compared with an analytical PSR model. Another analytical model using experimentally obtained input parameters determines the influence of beams of highly energetic electrons on the time averaged isotropic EEDF as measured by Langmuir probes. The main result is the observation of beams of highly energetic electrons during the sheath expansion phase, that are enhanced by the PSR effect. The paper shows that the nature of stochastic heating is closely related to electron beams and the PSR effect." @default.
- W2164335666 created "2016-06-24" @default.
- W2164335666 creator A5005908187 @default.
- W2164335666 creator A5007317384 @default.
- W2164335666 creator A5007555818 @default.
- W2164335666 creator A5010518216 @default.
- W2164335666 creator A5061030325 @default.
- W2164335666 date "2008-09-19" @default.
- W2164335666 modified "2023-10-18" @default.
- W2164335666 title "Stochastic heating in asymmetric capacitively coupled RF discharges" @default.
- W2164335666 cites W1966995630 @default.
- W2164335666 cites W1970179722 @default.
- W2164335666 cites W1972372311 @default.
- W2164335666 cites W1973718308 @default.
- W2164335666 cites W1977610920 @default.
- W2164335666 cites W1978578341 @default.
- W2164335666 cites W1979184741 @default.
- W2164335666 cites W1986710888 @default.
- W2164335666 cites W1988084053 @default.
- W2164335666 cites W1988940057 @default.
- W2164335666 cites W1990299123 @default.
- W2164335666 cites W1993361798 @default.
- W2164335666 cites W1996516514 @default.
- W2164335666 cites W2003848559 @default.
- W2164335666 cites W2004374932 @default.
- W2164335666 cites W2006495538 @default.
- W2164335666 cites W2006641948 @default.
- W2164335666 cites W2007112981 @default.
- W2164335666 cites W2008317127 @default.
- W2164335666 cites W2014182649 @default.
- W2164335666 cites W2020045108 @default.
- W2164335666 cites W2021117071 @default.
- W2164335666 cites W2028636997 @default.
- W2164335666 cites W2030508627 @default.
- W2164335666 cites W2031133529 @default.
- W2164335666 cites W2032133506 @default.
- W2164335666 cites W2036964892 @default.
- W2164335666 cites W2037377389 @default.
- W2164335666 cites W2038162632 @default.
- W2164335666 cites W2038270970 @default.
- W2164335666 cites W2042071870 @default.
- W2164335666 cites W2046965670 @default.
- W2164335666 cites W2049753483 @default.
- W2164335666 cites W2051544154 @default.
- W2164335666 cites W2051882755 @default.
- W2164335666 cites W2058136371 @default.
- W2164335666 cites W2060600644 @default.
- W2164335666 cites W2066557372 @default.
- W2164335666 cites W2073563254 @default.
- W2164335666 cites W2077484798 @default.
- W2164335666 cites W2077673183 @default.
- W2164335666 cites W2084220148 @default.
- W2164335666 cites W2084517727 @default.
- W2164335666 cites W2094019959 @default.
- W2164335666 cites W2095440262 @default.
- W2164335666 cites W2102665996 @default.
- W2164335666 cites W2106582005 @default.
- W2164335666 cites W2132564529 @default.
- W2164335666 cites W2147695505 @default.
- W2164335666 cites W2151160326 @default.
- W2164335666 cites W2160540763 @default.
- W2164335666 cites W2161143409 @default.
- W2164335666 cites W2161936211 @default.
- W2164335666 cites W2167562880 @default.
- W2164335666 cites W2169963373 @default.
- W2164335666 cites W2324085323 @default.
- W2164335666 cites W3100759817 @default.
- W2164335666 cites W42244841 @default.
- W2164335666 doi "https://doi.org/10.1088/0022-3727/41/19/195212" @default.
- W2164335666 hasPublicationYear "2008" @default.
- W2164335666 type Work @default.
- W2164335666 sameAs 2164335666 @default.
- W2164335666 citedByCount "80" @default.
- W2164335666 countsByYear W21643356662012 @default.
- W2164335666 countsByYear W21643356662013 @default.
- W2164335666 countsByYear W21643356662014 @default.
- W2164335666 countsByYear W21643356662015 @default.
- W2164335666 countsByYear W21643356662016 @default.
- W2164335666 countsByYear W21643356662017 @default.
- W2164335666 countsByYear W21643356662019 @default.
- W2164335666 countsByYear W21643356662020 @default.
- W2164335666 countsByYear W21643356662021 @default.
- W2164335666 countsByYear W21643356662022 @default.
- W2164335666 countsByYear W21643356662023 @default.
- W2164335666 crossrefType "journal-article" @default.
- W2164335666 hasAuthorship W2164335666A5005908187 @default.
- W2164335666 hasAuthorship W2164335666A5007317384 @default.
- W2164335666 hasAuthorship W2164335666A5007555818 @default.
- W2164335666 hasAuthorship W2164335666A5010518216 @default.
- W2164335666 hasAuthorship W2164335666A5061030325 @default.
- W2164335666 hasConcept C121332964 @default.
- W2164335666 hasConcept C184779094 @default.
- W2164335666 hasConcept C185544564 @default.
- W2164335666 hasConcept C185592680 @default.
- W2164335666 hasConcept C192562407 @default.
- W2164335666 hasConcept C49040817 @default.
- W2164335666 hasConcept C68687820 @default.
- W2164335666 hasConcept C82706917 @default.